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Equipment

Annealing
CVD-08Annealing Furnace, Multipurpose Teaching Lab
Backside
BKSIDE-01CMPStrasbaugh 6ECSubfab
BKSIDE-02Dicing Saw A - MicroautomationMicroautomation Chem Mix
BKSIDE-03Dicing Saw B - MicroautomationMicroautomation Chem Mix
BKSIDE-04Glove Box (Four Gloves)MBraun MB10Exploratory Lab/FabLab
Deposition
CVD-01RTA-410AG Associated 410CVD Tunnel
CVD-02RTA-610AG Associated 610CVD Tunnel
CVD-03Atomic Layer Deposition SystemBeneq TFS 500 ALDCVD Tunnel
CVD-04Nanowire Growth SystemAtomate CVD Tunnel
CVD-05LP-CVD FurnaceCVD Systems CVD Tunnel
CVD-06Tystar CVDTystar TytanCVD Tunnel
CVD-07Oxford PECVDOxford Instruments PlasmaLab System 100CVD Tunnel
DEP-01AJA Sputtering unitAJA International ATC 1800-VDEP Tunnel
DEP-02Metra Thermal EvaporatorMetra DEP Tunnel
DEP-03Denton Ebeam/thermal evaporatorDenton DEP Tunnel
DEP-04Temescal Ebeam DepositionTemescal BJD-1800DEP Tunnel
DEP-05Denton DV-502A carbon evaporatorDenton DV-502AExploratory Lab
DEP-06Parylene CoaterSCS Equipment PDS 2010 Labcoter 2Exploratory Lab
Etching
ETCH-01Etch tunnel Acid Bench 1 ETCH Tunnel
ETCH-02Etch tunnel Acid Bench 2 ETCH Tunnel
ETCH-03Etch tunnel Caustic/Base Bench ETCH Tunnel
ETCH-04Etch tunnel Solvent Bench ETCH Tunnel
ETCH-05Oxford Ion MillOxford Instruments ETCH Tunnel
ETCH-07Oxford ICP Etcher(Chlorine)Oxford Instruments ETCH Tunnel
ETCH-08STS EtcherSurface Technology Systems ETCH Tunnel
ETCH-09Teaching Lab Acid Wet Bench Teaching Lab
ETCH-10Teaching Lab Caustic/Solvent Wet Bench Teaching Lab
ETCH-11Sample Preb Wet Bench Exploratory Lab
ETCH-12Furnace Preclean Web Bench CVD Tunnel
ETCH-13Critical Point Dryer ETCH Tunnel
ETCH-14Oxford Etcher (Fluorine)Oxford Instruments ETCH Tunnel
ETCH-15XactiX Xenon Difluoride EtcherXactix FabLab
Lithography
PHOTO-01Raith e_LiNERaith SEM Room
PHOTO-02JEOL 6400/Nabity E-beamJEOL 840/NabityExploratory Lab
PHOTO-03MJB-3 Mask alignerKarl Suss America Inc. MJB-3Teaching Lab
PHOTO-04MJB-3 Mask dual side alignerKarl Suss America Inc. MJB-3 w/ BacksideTeaching Lab
PHOTO-05EVG 620 Mask AlignerEVG 620PHOTO Tunnel
PHOTO-06EVG 501 BonderEVG 501PHOTO Tunnel
PHOTO-07Oriel Mask AlignerOriel PHOTO Tunnel
PHOTO-08Photoresist Spin Station- FABLABHeadway EC-101PHOTO Tunnel
PHOTO-09Photoresist Spin Station- Teaching LabHeadway EC-101Teaching Lab
PHOTO-10Developing Bench PHOTO Tunnel
PHOTO-11March Jupiter III O2 plasma systemMarch Jupiter IIIPHOTO Tunnel
PHOTO-12Polymer Spin Station Exploratory Lab
PHOTO-13Raith off line computerRaith Exploratory Lab
PHOTO-14Branson Barrel Resist StripperBranson Photo Tunnel
Metrology
LAMP-NBSL-01H-J-Y Raman MicroscopeHoriba Jobin Yvon LabRAM HRJ.M. Patterson 2227
LAMP-NBSL-02Sopra Spectroscopic EllipsometerSopra GES5EJ.M. Patterson 2225
MET-01Hitachi S-3400 Variable Pressure SEMHitachi S-3400NExploratory Lab
MET-02Stress Measurement ToolFlexus 2300Main Fab Hall
MET-03N&K SpectrophotometerN & K FABLAB
MET-04EllipsometerRudolph Auto EL IIIMain Fab Hall
MET-05Profilometer Tencor AlphaStep 200AlphaStep 500Teaching Lab
MET-06Optical MicroscopeLeica Main Fab Hall
MET-07Profilometer Tencor TP-20AlphaStep 200FABLAB
MET-08Optical MicroscopeNikon 5400CPTeaching Lab
MET-09Optical MicroscopeLeica Teaching Lab
MET-10Optical MicroscopeZeiss Axiolab APHOTO Tunnel
MET-11Probe Station IAlessi/Agilent 4155CTeaching Lab
MET-12MicroZoom Probe StationBausch & Lomb Teaching Lab
MET-13Hall Effect Measurement SystemEcopia Corp HMS-5000Exploratory Lab
MET-14Solar Cell SimulatorNewport 91159Exploratory Lab
MET-15Micromeritics ASAP 2020 Porosimeter Test StationMicromeritics ASAP 2020Exploratory Lab/FabLab
NISP-01JEM 2100 FEG TEM NispLab
NISP-02JXA 8900R Microprobe NispLab
NISP-03JEM 2100 LaB6 TEM NispLab
NISP-04Hitachi SU-70 SEM NispLab
NISP-05FEI Dual Beam FIB IREAP 0202A
NISP-06D-3000 AFM 1310 Chemical and Nuclear Engineering Building
NISP-07NT-MDT NTegra Spectra AFM ProbeNTMDT nTegra SpectraNISPLab2
NISP-08Horiba JY iHR320 Imaging SpectrometerHoriba iHR320NISPLab2
NISP-09Shimadzu IR Prestige21 FTIR SpectrometerShimadzu IR PrestigeNISPLab2
SAC-01H-J-Y Raman Microscope (Chemistry)Horiba Jobin Yvon LabRam ARAMISChemistry BO127
SAC-02AFM (Chemistry) Chemistry BO127


A. James Clark School of Engineering    College of Computer, Mathematical, and Natural Sciences

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