Equipment List

Sort by: ID, Name, Category, Location

ID	Name	Location
ALD-3	Beneq ALD System
CVD-1	Plasma-enhanced CVD
e-beam-1	Raith eLine E-Beam
anneal
RTA-1	AG Assoc RTA
RTA-3	Bio RAD RTA	FabLab
RTA-2	Heat Pulse RTA	FabLab
assy/test
etest-1
DEA-2970	Dielectric Analyzer	Functional Macromolecular Laboratory
DSC	Differential Scanning Calorimeter	Functional Macromolecular Lab
DMA	Dynamic Mechanical Analyzer	Functional Macromolecular Lab
char-metrol
AFM-F2
opt-1
probe-F2
SEM-1		LIBRA
AFM-P1	AFM 3100	LPS
probe-F1	Cascade probe station
microscope-5	confocal/fluorescence microscope	LAMP
microtome	Cryo-Ultra Microtome	Functional Macromolecular Lab
probe-R1	custom scanning wafer probe (4PP etc.)	LAMP
ESEM	environmental SEM
SEM-2	field emission SEM	LAMP-NBSL
NBSL-Raman	J-Y LabramHR confocal Raman microscope	NanoBio Systems Lab (NBSL)
AFM-F1	JEOL variable temperature AFM
SPM-W2	JEOL variable temperature UHV-STM/AFM/SEM
profilom-1	KLA-Tencor AlphaStep 200	FabLab
profilom-2	KLA-Tencor AlphaStep 500
surf-2	Kratos small-spot XPS
microscope-1	Leitz microscope #1
microscope-2	Leitz microscope #2	FabLab
microscope-3	Leitz microscope #3	FabLab
surf-1	Leybold surface analysis system	LAMP-NBSL
opt-2	liquid phase analysis of atomic constituents
microscope-4	Nikon microscope #4	FabLab
SPM-W1	Omicron variable temperature UHV-STM
Keck-SMM	UHV STM/uwave uscope	Keck Lab - annex
surf-P1	VG SAM/XPS
cleaning
UVO3-1	UV ozone cleaner	FabLab
deposition
evap-2	Airco BJD 1800 bell-jar e-beam dep	FabLab
ALD-2	atomic layer deposition furnace	LAMP
CNT-1	CNT furnace
evap-3	Cooke Thermal Deposition Tool	FabLab
furnace-4	CVD Corp LPCVD
evap-1	Ebeam Deposition Tool	FabLab
furnace-2	homemade atmospheric furnace	FabLab
sputt-3	LPS custom S-gun sputter deposition	FabLab
evap-4	Metra Thermal Deposition Tool	FabLab
sputt-2	MRC 603 sputter deposition	FabLab
furnace-1	MRL HT 1012 furnace
sputt-clus	SFI custom multilayer sputter deposition
combi-CVD	spatially programmable CVD	LAMP
sputt-1	Sputter Deposition Tool	FabLab
furnace-3	Tystar 3-tube furnace	FabLab
ALD-1	UHV atomic layer deposition	LAMP
Keck-LMBE	UHV laser MBE	Keck Lab
Keck-XFER	UHV suitcase	Keck Lab
etch
plas-1	Flourine RIE-1
plas-2	Flourine RIE-2	FabLab
dryetch-2	Oxide/Nitride RIE	FabLab
dryetch-1	Photoresist Strip Tool	FabLab
dryetch-3	STS Deep RIE etcher	FabLab
dryetch-4	Trion RIE
lithography
align-1	3" Mask Aligner	FabLab
align-bond-alig	4" Mask Aligner	FabLab
align-bond-insp	EVG IR wafer bonder inspection	FabLab
align-bond-bond	EVG Wafer Bonder	FabLab
e-beam-litho-1	FEI SEM/litho
cure-1	Fusion deep UV curing	FabLab
spin-1	Headway spinner	FabLab
spin-2	Headway spinner	FabLab
spin-3	Headway spinner	FabLab
e-beam-litho-2	JEOL E-beam Writer
e-beam-litho-3	JEOL SEM/litho	FabLab
align-2	Oriel aligner
microscopy
TEM-FE	JEOL 2100F field emission TEM	NispLab
Microprobe-SEM	JEOL JXA-8900 Superprobe	NispLab
TEM-LaB6	TEM with LaB6 filament	NispLab
miscellaneous
bonder-3	K&S 1471 wire bonder
bonder-1	K&S bonder	FabLab
saw-1	K&S wafer saw
orbweld-1	orbital tubing welder
CMP-1	Strasbaugh 6EC CMP