Equipment

Want to make a carbon nanotube transistor? Or perhaps a multiple quantum well laser? How about creating a thin metal film one atomic layer at a time? An artificial nose on a silicon chip or a miniature motor? Maybe a biology lab for medical applications on a single chip?

FabLab has the equipment and expertise needed to handle all of these projects and more. We've recently added several cutting-edge tools to our inventory including:

• a Direct Write Electron Beam Lithography tool for creating features with dimensions as small as 20 nanometers or less
• an Atomic Layer Deposition system for depositing thins films one atomic layer at a time
• a Nanowire and Nanotube Growth system for silicon and germanium components
• an Inductively Coupled Plasma Etcher for III-V materials such as GaAs and InP
• a Plasma Enhanced Chemical Vapor Deposition system for stress free thin films
• an Environmental Scanning Electron microscope with surface analysis capability for in-situ evaluation of chemical and biological samples

For a full listing of our tool set and their capabilities, please view our Equipment list.