FabLab home

Equipment

FabLab has the equipment and expertise needed to handle your projects' needs. A selection of our tools include:

Annealing
ID Name Location Superuser
CVD-08Annealing Furnace, Multipurpose
FabLabThomas Loughran
Backside
ID Name Location Superuser
BKSIDE-01CMP
FabLabJohn Abrahams
BKSIDE-02Dicing Saw A - Microautomation
FabLabJohn Abrahams
BKSIDE-03Dicing Saw B - Microautomation
FabLabJohn Abrahams
BKSIDE-04Glove Box - Exploratory Lab
FabLabMark Lecates
Deposition
ID Name Location Superuser
CVD-01RTA-410
FabLabJohn Abrahams
CVD-02RTA-610
FabLabJohn Abrahams
CVD-03Atomic Layer Deposition System
FabLabJohn Abrahams
CVD-04Nanowire Growth System
FabLabThomas Loughran
CVD-05LP-CVD Furnace
FabLabThomas Loughran
CVD-06Tystar CVD
FabLabThomas Loughran
CVD-07Oxford PECVD
FabLabThomas Loughran
DEP-01AJA Sputtering unit
FabLabJonathan A. Hummel
DEP-02Metra Thermal Evaporator
FabLabThomas Loughran
DEP-03Denton Ebeam/thermal evaporator
FabLabThomas Loughran
DEP-04Temescal Ebeam Deposition
FabLabThomas Loughran
DEP-05Denton DV-502A carbon evaporator
FabLabJonathan A. Hummel
DEP-06Parylene Coater
FabLabMark Lecates
DEP-07Angstrom NexDep Ebeam evaporator
FabLabMark Lecates
Etching
ID Name Location Superuser
ETCH-01Etch tunnel Acid Bench 1
FabLab
ETCH-02Etch tunnel Acid Bench 2
FabLab
ETCH-03Etch tunnel Caustic/Base Bench
FabLab
ETCH-04Etch tunnel Solvent Bench
FabLab
ETCH-05Oxford Ion Mill
FabLabJonathan A. Hummel
ETCH-07Oxford ICP Etcher(Chlorine)
FabLabThomas Loughran
ETCH-08STS Etcher
FabLabJonathan A. Hummel
ETCH-09Teaching Lab Acid Wet Bench
FabLab
ETCH-10Teaching Lab Caustic/Solvent Wet Bench
FabLab
ETCH-11Sample Preb Wet Bench
FabLabMark Lecates
ETCH-12Furnace Preclean Web Bench
FabLab
ETCH-13Critical Point Dryer
FabLabJonathan A. Hummel
ETCH-14Oxford Etcher (Fluorine)
FabLabMark Lecates
ETCH-15XactiX Xenon Difluoride Etcher
FabLabJonathan A. Hummel
ETCH-16Exploratory Lab Wet Bench
FabLab
Lithography
ID Name Location Superuser
PHOTO-01Raith e_LiNE
FabLabJonathan A. Hummel
PHOTO-02JEOL 6400/Nabity E-beam
FabLabJonathan A. Hummel
PHOTO-03MJB-3 Mask aligner
FabLabJohn Abrahams
PHOTO-04MJB-3 Mask dual side aligner
FabLabThomas Loughran
PHOTO-05EVG 620 Mask Aligner
FabLabJohn Abrahams
PHOTO-06EVG 501 Bonder
FabLabJonathan A. Hummel
PHOTO-07Oriel Mask Aligner
FabLab
PHOTO-08Photoresist Spin Station- FABLAB-PM-101 manual
FabLabJohn Abrahams
PHOTO-09Photoresist Spin Station- Teaching Lab
FabLabJohn Abrahams
PHOTO-10Developing Bench
FabLab
PHOTO-11March Jupiter III O2 plasma system
FabLabThomas Loughran
PHOTO-12Polymer Spin Station
FabLabThomas Loughran
PHOTO-13Raith off line computer
FabLabJonathan A. Hummel
PHOTO-14Branson Barrel Resist Stripper
FabLabMark Lecates
PHOTO-15Photoresist Spin Station- FABLAB-PWM32-Programable
FabLabJohn Abrahams
PHOTO-16Photoresist Spin Station- Laurell
FabLabJohn Abrahams
Metrology
ID Name Location Superuser
MET-01Hitachi S-3400 Variable Pressure SEM
FabLabJonathan A. Hummel
MET-02Stress Measurement Tool
FabLabThomas Loughran
MET-03N&K Spectrophotometer
FabLabJohn Abrahams
MET-04Ellipsometer
FabLabJohn Abrahams
MET-05Profilometer P-20 Long Scan profiler
FabLabMark Lecates
MET-06Optical Microscope
FabLab
MET-07Profilometer Tencor Alpha Step 200
FabLabMark Lecates
MET-08Optical Microscope
FabLab
MET-09Optical Microscope
FabLab
MET-10Optical Microscope
FabLab
MET-11Probe Station I
FabLabJohn Abrahams
MET-12MicroZoom Probe Station
FabLab
MET-13Hall Effect Measurement System
FabLabJohn Abrahams
MET-14Solar Cell Simulator
FabLabJohn Abrahams
MET-15Micromeritics ASAP 2020 Porosimeter Test Station
FabLabJohn Abrahams
MET-16Micromeritics ASAP 2020 Porosimeter Degas #1
FabLabJohn Abrahams
MET-17Probe Station II
FabLabJohn Abrahams
MET-18Micromeritics ASAP 2020 Porosimeter Degas #2
FabLabJohn Abrahams
MET-19JEOL 6400 SEM imaging
FabLabJonathan A. Hummel
MET-20Arbin BT2000 Battery Test Station
FabLab
MET-21Perkin-Elmer ICP-OES
FabLabEleanor Gillette
MET-22Profilometer P-1 Long Scan Profiler
FabLabMark Lecates