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Equipment List

Below is a list of equipment that is currently used in the FabLab. Click on the tool name to see more information about the tool.

35 tools found.
Equipment name Status
AJA Sputtering unit Active
Alessi Probe Station/Agilent 4155C Active
Bio Rad RTA Active
CMP Active
Denton Ebeam/thermal evaporator Active
Etch tunnel Acid Bench 1 Active
Etch tunnel Acid Bench 2 Active
Etch tunnel Caustic/Base Bench Active
Etch tunnel Solvent Bench Active
EVG Bonder Active
EVG Mask Aligner Active
Headway EC-101 Spinner Active
Headway EC-101 Spinner Active
Headway PWM32 Spinner Active
Hitachi S-3400 Active
JEOL 840/Nabity E-beam Active
LP CVD Furnace Active
Metra Thermal Evaporator Active
Micro Automation Dicing Saw Active
MJB-3 Mask aligner Active
MJB-3 Mask dual side aligner Active
N&K Spectrophotometer Active
Oriel Mask Aligner Active
Photo Tunnel Developing Bench Active
Probe Station Active
Raith e_Line Active
Raith off line computer Active
RTA- 410 Active
RTA- 610 Active
STS Etcher Inactive
Teaching Lab Acid Wet Bench Active
Teaching Lab Caustic/Solvent Wet Bench (left) Active
Teaching Lab Caustic/Solvent Wet Bench (Right) Active
Temescal Ebeam Deposition Active
Trion RIE Active

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