Fees
The Maryland NanoCenter FabLab is a Shared Experimental Facilities and is open to serve the research needs for members of the campus community, University of Maryland System Schools, outside universities, government agencies, and commercial organizations. University of Maryland Faculty who are official members of the Maryland NanoCenter receive a 20% discount.
|
UMCP
NanoCenter Member |
UMCP |
External/Non-Profit |
Commercial |
|---|
| Process Tools |
62 |
77 |
110 |
225 |
|---|
| E-Beam Litho - Raith
(1) |
36 (18) |
45 (22.5) |
77 (35.50) |
130 (65) |
| E-Beam Litho - JEOL (2) |
29 (14.50) |
36 (18) |
62 (31) |
104 (52) |
| Hitachi SEM |
21 |
28 |
40 |
80 |
|---|
ASAP 2020 Porosimeter (3)
|
15 (5) |
15 (5) |
19 (7) |
44 (14) |
|---|
| Wafer Probe Station, CMP, Dicing Saw, Glove Box |
22 |
28 |
40 |
80 |
|---|
All rates in are in $/hour.
(1) Rate is for Raith eLine system runs of 6 hours or less. For runs longer than six hours, the first six hours will be charged at the published rate and any hours over six hours will be charged at 50% of the regular rate.
(2) Rate is for JEOL system rate is 20% less than the Raith.
(3) Rate is for first 4 hours with each additional hour in ($).
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