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Main Fab


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Etch Tunnel Photo Tunnel Deposition Tunnel
CVD/Diff Tunnel

Main Fab

The Main Fab is the primary cleanroom in Maryland NanoCenter. A large class 1000 facility, it contains processing equipment for lithography, deposition, etching, planarization, and other operations essential to fabrication of micro- and nano- structures. The FabLab also includes auxiliary spaces for exploratory processes, teaching microfabrication methods, support equipment, characterization, and operations.