Field Emission Gun Transmission Electron Microscope (FEG-TEM)
JEOL JEM 2100F TEM/STEM

Location: 1237C Jeong H. Kim Engineering Building (#225)
Phone: (301) 405-8231
Webcam

The JEM 2100 FE-TEM, a field-emission gun transmission electron microscope, is a state-of-the-art and fully equipped ultra-high resolution analytical TEM that is capable of providing high spatial resolution atomic imaging and microstructure analysis of material samples. 

This microscope uses a high-brightness and high-coherence electron beam to carry out ultra-high resolution microchemical analysis using its attached energy dispersive x-ray spectrometer (EDS) and electron energy loss spectrometer (EELS). The 2100 FEG-TEM is also equipped with a scanning image observation device, thus becoming a so-called scanning transmission electron microscope (STEM). This enables researchers to observe and investigate samples in a scanning mode that further expands its applications; for instance, to acquire a material's chemical composition from a small point or a line profile, or to reveal elemental distribution maps.

This FEG-TEM is also equipped with a Gatan imaging filter that comes with sophisticated software covering all aspects of energy-filtered imaging and energy-loss spectroscopy (EELS). Energy-filtering is a powerful technique that can dramatically improve image contrast and resolution in the TEM as well as quickly obtain highly sensitive elemental maps of materials. By contrast, energy-filtering transmission electron microscopy (EFTEM) is capable of producing electron images from only a narrow range of energies.

Specifications:

• Accelerating Voltage: 160, 200 kV
• Electron Gun: ZrO/W(100) Schottky field emission electron source
• Scanning System: JEOL SIOD digital scanning system with B-F and D-F detectors
• Resolution:
  • 0.19 nm (point-to-point)
  • 0.10 nm (lattice)
  • 0.2 nm (STEM lattice)
• Spot Size:
  • 2—5 nm (TEM mode)
  • 0.5—2.4 nm (Analytical mode)
• Specimen Tilt: +/- 25° (X/Y)
• Image Recording: CCD and/or film
• EDS: Oxford (INCA 250) system
• EELS/Imaging Filter: Gatan (863 GIF Tridiem) system
• CCD cameras (2): Orius 1000, 2.6k x 4k; Ultrascan 1000, 2k x 2k

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Transmission Electron Microscope (LaB₆ TEM)
JEOL JEM 2100 TEM  

Location: 1237B Jeong H. Kim Engineering Building (#225)

The JEOL JEM 2100 LaB₆ TEM is a workhorse microscope for multi-purpose use. This transmission electron microscope provides solutions for a wide range of problems in many fields of science and engineering, including nanomaterials, nanoscience, biological sciences, and medical sciences.

The JEM-2100 TEM has three independent condenser lenses and produces the highest probe current for any given probe size. It also allows the user to select various illumination conditions, ranging from full convergent beam to parallel illumination. These functions enable improved analytical and diffraction capabilities in addition to high resolution imaging. The incorporation of the objective mini lens in the TEM with special modification provides the ability of performing Lorentz microscopy experiments.

The JEM 2100 has been used for microstructure studies of a variety of materials, including biological and soft materials. With special specimen holders and TV and CCD cameras, it is also capable of carrying out high temperature and liquid nitrogen temperature in-situ studies for dynamic observation and experiments. The special cryo-TEM specimen holder also allows researchers to carry out 3-D tomography research. An Oxford EDS system is attached for the micro-chemical analysis of materials. The JEM 2100 also serves as our primary training and laboratory class microscope.

Specifications:

• Accelerating Voltage: 80, 100, 120, 160 and 200 kV
• Electron Gun: LaB₆ thermionic emission electron source
• Resolution:
  • 0.23 nm (point-to-point)
  • 0.14 nm (lattice)
• Spot Size:
  • 20 - 200 nm (TEM mode)
  • 1.0 - 25 nm (Analytical mode)
• Specimen Tilt: +/- 30° (X/Y)
• Image Recording: CCD (Gatan, Orius 1000) and/or film
• EDS: Oxford (INCA 100) system

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Transmission Electron Microscope (LaB₆ TEM)
JEOL JEM 4000FX TEM/STEM

Location: 1312A Chemical and Nuclear Engineering Building (#90)
Phone: (301) 405-5239

The JEOL JEM 4000FX LaB₆ TEM is a conventional high voltage high resolution TEM with scanning capability (STEM). This TEM has been used for micro-structural studies of a variety of materials, mainly physical sciences materials and solids such as thin films, metals, ceramics, minerals, semiconductors, and conductors. 

The objective lens of JEM-4000FX TEM has been specially modified for Lorentz microscopy experiments. A TV camera is attached in the microscope for in-situ studies.

The JEM 4000FX TEM is one of the only three dozen of its kind currently operating in the world. With its high voltage, high resolution, and large pole piece gap, the JEM 4000 FX provides a unique opportunity for UMD researchers to carry out special projects at the forefront of research.

Specifications:

• Accelerating Voltage: 100, 200, 250, 300, 350 and 400 kV
• Electron Gun: LaB₆ single crystal thermionic emission electron source
• Scanning System: JEOL AISD
• Resolution:
  • 0.2 nm (point-to-point)
  • 0.14 nm (lattice)
• Spot Size:
  • 20 nm—2 µm (TEM mode)
  • 2.0—50 nm (Analytical mode)
• Specimen Tilt: +/- 30° (X/Y)
• Image Recording: Film and/or TV (Gatan)

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Ultra-High Resolution Scanning Electron Microscope (FEG-SEM)
Hitachi SU-70 Analytical UHR FEG-SEM

Location: 1237B/C Jeong H. Kim Engineering Building (#225)
Phone: (301) 405-0113

The Hitachi SU-70 Schottky field emission gun scanning electron microscope is a state-of-the-art SEM for ultra-high resolution morphological imaging, microstructural study, and fast and precise microchemical analysis, both qualitatively and quantitatively.  

With a newly designed electron gun and electron optics, the SU-70 SEM provides a high source of brightness for ultra-high resolution imaging at both high and low accelerating voltages. The combination of the new Bruker’s silicon drift detector (SDD) and high probe current generated by the SU-70 SEM offers fast microchemical analysis such as elemental identification, elemental mapping and line profile analysis with high precision. 

Specifications:

Secondary Electron Image Resolution

• 1 nm (15 kV, WD = 4.0 mm)
• 1.6 nm (1 kV, WD = 1.5 mm, deceleration mode)
• 2.5 nm (1 kV, WD = 1.5 mm)

Magnification

• LM mode: 20 ~ 2,000x
• HM mode: 100 ~ 800,000x

Electron Optics

• Electron gun: ZrO/W Schottky emission electron source
• Accelerating voltage: 0.5 ~ 30 kV (normal mode)
• Probe current: 1pA ~ 200 nA
• Landing voltage: 0.1 ~ 2.0 kV (decelerating mode)

Specimen Stage

• Stage control: 5-axis motor drive
• Movable range:
  • X: 0 ~ 110 mm
  • Y: 0 ~ 110 mm
  • Z: 1.5 ~ 40 mm
  • T: -5° ~ +70°
  • R: 360

Detectors

• Secondary/backscattered electron detectors (upper and lower)
• Energy-dispersive X-ray detector (Bruker)

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Electron Microprobe
JEOL JXA-8900 Superprobe

Location: 1237D Jeong H. Kim Engineering Building (#225)
Phone: (301) 405-7948
Webcam

An electron probe microanalyzer (EPMA) uses a focused electron beam to acquire information about the structure and chemical composition of materials.  An outstanding feature of the electron probe microanalyzer is that it is capable of wide-range elemental analysis and observation from ultramicro-areas to wide areas on the specimen surface.

The JEOL JXA 8900 superprobe is a wavelength-dispersive (WD) and energy-dispersive (ED) combined X-ray spectrometer and microanalyzer that is capable of providing quick qualitative elemental identification as well as precise quantitative micorchemical analysis. This microprobe also equipped with a cathode luminescence detector for additional chemical composition study.

Specifications:

• Accelerating Voltage: 0.2 to 40 kV
• Illumination Current: 10^-12 to 10^-5 A
• X-Ray Spectrometry Range: 0.087—9.3 nm
• Resolution:
  • Secondary Image: 6 nm (WD 11 mm, 35 kV)
  • Detectable Element: ₅B—₉₂U
• Max. Specimen Size: 100 mm x 100 mm x 50 mmH
• Analysis Area:  90 mm x 90 mm
• Detectors: Secondary/backscattered electron detector
  • 1 Energy-dispersive X-ray spectrometer (EDS)
  • 5 Wavelength-dispersive X-ray spectrometer (WDS)
  • 1 Cathedoluminences detector

 

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Environmental Scanning Electron Microscope (ESEM)
ElectroScan E-3 ESEM

Location: 1127 Chemical and Nuclear Engineering Building (#90)
Phone: (301) 405-8527

The ElectroScan E-3 SEM is an environmental SEM that offers a unique ability in imaging material at near atmospheric pressure.  In addition to functioning like a traditional SEM, the ESEM allows the researcher to examine unprepared, uncoated specimens that are free from surface charging and from damage caused by preparation or by introduction into a high vacuum environment. 

The ESEM makes it possible to view wet or moist specimens in their natural states. Biological tissues, textiles, wet or oil-bearing geological samples, adhesives, foodstuff and other materials can be examined in states previously impossible to observe in a conventional SEM. Since the ESEM can function with a water vapor atmosphere, it can be used to observe and record processes such as dissolving, crystallization and dehydration. 

Specifications:

• Secondary Electron Image Resolution: 5nm (30 kV)
• Magnification: 250 ~ 100,000x
• Electron Optics:
  • Electron Gun: LaB₆ thermionic emission electron source
  • Accelerating Voltage: 5 ~ 30 kV                   
• Specimen Stage: 5-axix motorized stage
• Detector: Secondary/Backscattered Electron Detector
• Attachment:
  • Liquid nitrogen temperature stage

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Ultra-High Resolution Field Emission Gun Scanning Electron Microscope (FEG-SEM)
Hitachi S-900H Ultra-High Resolution FEG-SEM

This microscope is currently under installation.

 

Location: 1127 Chemical and Nuclear Engineering Building (#90)
Phone: (301) 405-8527

The Hitachi S-900 Schottky field emission gun scanning electron microscope is a dedicated ultra-high resolution SEM for morphological imaging and microstructural study.

The specially designed electron optics in the S-900H SEM provide a high source of brightness and an extra small electron beam for ultra-high resolution imaging. The S-900H is used mainly for the morphological and structural investigation of the surfaces of materials.

Specifications:

Secondary Electron Image Resolution

• 0.7nm (30 kV, STM Mode)
• 4.0 nm ( 1 kV, STD Mode)
• 3.0 nm ( 1 kV,UHR Mode)

Magnification

• STD Mode: 250 ~ 800,000x
• UHR Mode: 500 ~ 800,000x

Electron Optics:

• Electron Gun:  ZrO/W Schottky emission electron source
• Accelerating Voltage:
  • 0.5 ~ 5 kV (variable in 100 V steps)
  • 6 to 30 kV (variable in 1 kV steps)
• Probe Current: 1pA ~ 200 nA

Specimen Stage

• Movable Range:
  • X: +/- 3.5 mm
  • Y: +/- 1.5 mm
  • Z: +/- 0.3 mm
  • T: +/- 15°

Detectors

• Secondary Electron Detector

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Scanning Force (Probe) Microscope (SFM)
Vecco Dimension 3000 Atomic Force Microscope (D-3000 AFM)

Location: 1310 Chemical and Nuclear Engineering Building (#90)
Phone: (301) 405-6552

The atomic force microscope (AFM), or scanning force microscope (SFM), is a very high-resolution type of scanning probe microscope, with a demonstrated resolution of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. The AFM provides a true three-dimensional surface profile. Additionally, samples viewed by the AFM do not require any special treatments (such as metal/carbon coatings) that would irreversibly change or damage the sample. This makes it possible to study biological macromolecules and even living organisms. The AFM can provide true atomic resolution in an ultra-high vacuum (UHV) and, more recently, in liquid environments. High resolution atomic force microscopy is comparable in resolution to scanning tunneling microscopy (STM) and transmission electron microscopy (TEM).

The Dimension 3000 produces high-resolution, 3-D images by scanning a sharp probe over the sample surface. It can be operated with different imaging modes: contact mode, tapping mode, and lateral force mode, force modulation mode and interleave scanning and lift mode. It can also be used in fluid contact mode.

 

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Specimen Preparation Facilities

Location: 1127 Chemical and Nuclear Engineering Building (#90)
Phone: (301) 405-7725
Webcam

Our specimen preparation facilities include various vacuum coaters and polishers for thinning samples and preparing them for electron microscopy observation. A Leica EM UC6 Cryo-Ultramicrotome with Diamond Knife is available for thin sectioning of materials in the Functional Macromolecular Laboratory. (Learn more about the EM UC6 »)