Maryland NanoCenter

University of Maryland College Park



MEMS & NEMS  MEMS & NEMS

  • A Micromechanical Biosensor Using Chitosan Polymer
  • A Novel Benzocyclobutene-Based Device for Studying the Physics of the Ebullition Process
  • BioLabs-On-A-Chip: Integrating MEMS Actuators on CMOS Chips for Cell Sensing Applications
  • Dual Axis Optical Fiber Alignment using Gray-scale Technology
  • Electrostatic Micromotor Supported on Microball Bearing
  • Fabrication and Characterization of Graded Nanostructured Materials
  • In Situ Biomolecule Assembly and Activity within Completely Packaged Microfluidic Devices
  • Indium Phosphide MEMS for Integrated Bio-Sensing
  • Monolithic In-Plane Tunable Optical Filter
  • Single Crystal AlGaAs Based Low Power Low Loss Peizoelectric Resonators
  • Surface Modification of PMMA and COC Microfluidic Substrate by UV-Ozone Treatment

Inorganic Nano  Inorganic Nano

  • ALD-based HfO2 nanotube manufacturing from porous alumina nano-templates
  • Combinatorial Investigation of Functional Oxide Thin Films
  • Combinatorial Investigation of Metallic Alloy Systems
  • Combinatorial Laser Molecular Beam Epitaxy for Atomically Controlled Synthesis of Oxide Tin Films
  • Cytotoxicity and Cellular Uptake of Magnetic Nanotubes
  • Electron beam induced deposition of low resistivity platinum from Pt(PF3)4
  • Multiferroic oxide films based on BiFeO3
  • Nanoscale Imaging Spectroscopy and Properties Laboratory

Nanomanufacturing  Nanomanufacturing

  • Atomic Layer Deposition (ALD) for Nano Applications
  • Chemical Sensing and Advanced Process Control for AlGaN/GaN HFET Manufacturing
  • Combinatorial Materials Science Development of Polymer Nanocomposites using Twin Screw Extrusion
  • Combinatorial Process Research for Nano Applications
  • Interactions of Plasmas with Model Polymers for Advanced Photoresists
  • Investigation of Plasma-Polymer Interactions for Plasma/Energetic Beam Templating of Materials
  • Nanotechnological Manufacturing: Nanostructured Polymers Designed for Plasma/Energetic Beam Templating of Materials
  • NISP lab poster
  • Process Performance of H2 Remote Plasma Based Photoresist Ashing Processes and Their Influence on ULK Materials Modifications

Scientific Insights  Scientific Insights

  • A cryogenic scanning probe microscope
  • Extended Lattice Gas Interactions: Ab-initio Evaluation on Cu Surfaces and Implications
  • Instruments for Probing the Nanoscale
  • Magnetotransport of low dimensional electrons at 9mK
  • Nanoscale Ferromagnetic Patterning and Geometric Frustration Imaging with Lorentz Microscopy

 



A. James Clark School of Engineering    Computer, Mathematical, and Physical Sciences    College of Chemical & Life Sciences

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