April 25, 2024 UMD Home FabLab AIMLab
JEOL 6400/Nabity E-beam Back to Equipment List
Operational Status ● Online
Description

Rates are for first 6 hours; additional hours in reservation are billed at 50%

For Ebeam Lithography with Nabity software

Configuration:
- JEOL JSM-6400 Scanning Microscope
- Nabity EBL software on a Dell PC
- Scanservice Corp. Beam Blanker
- Keithley Pico-Ammeter

Location FabLab | Exploratory Lab
Manufacturer JEOL 840/Nabity
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$33/hr
External Non-profit / University
$51/hr
Small Commercial / MTECH
$75/hr
Large Commercial
$120/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Jun 29, 2017
9:30 am - 11:00 am
Cathleen Needham
View Reservation

Deleted by: Jonathan Hummel

Wed, May 31, 2017
9:00 am - 10:30 am
Cathleen Needham
View Reservation

Deleted by:

Mon, May 15, 2017
1:00 pm - 2:00 pm
Cathleen Needham
View Reservation

Deleted by: Jonathan Hummel

Thu, Apr 06, 2017
11:45 am - 12:45 pm
Yilin Wang
View Reservation

Deleted by:

Tue, Apr 04, 2017
2:30 pm - 3:30 pm
Yilin Wang
View Reservation

Deleted by:

Records to show:
SOPs
index.php (38 B)
photo-02_sop_JEOL_direct_write_ebeam.pdf (347.19 KB)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

PMMA

PMMA_Data_Sheet.pdf (1.14 MB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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