May 2, 2024 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.

For runs over 2 hours:
$10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-V, 2-SiO2, 3-Al
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):
Au: $82 per 1000A
Pt: $70 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
05/02/2024 08:00 AM 02:00 PM Bhuvsmita Bhargava
Logs
Thu, May 02, 2024
8:00 am - 2:00 pm
Bhuvsmita Bhargava
View Reservation
V, Al
Wed, May 01, 2024
1:00 pm - 2:00 pm
Yi-Siou Huang
View Reservation
SiO2
Tue, Apr 30, 2024
10:00 am - 3:00 pm
Andrew Evangelista
View Reservation
Gold (1000 A), silver, and alumina
Mon, Apr 29, 2024
10:00 am - 11:00 am
ZIYANG SHEN
View Reservation
Ti, Pt 1175 angstroms $82.25
Thu, Apr 25, 2024
10:00 am - 3:00 pm
Andrew Evangelista
View Reservation

Deleted by: Mark Lecates

Alumina, Gold (1000 Angstroms), Silver
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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