| Operational Status | ● Online | |||||||||||||||
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| Description |
The custom-built Denton Evaporator is a multi source evaporator with the following features:
4-pocket electron beam evaporation source
Handles up to 4" diameter substrates
Substrate heating to 300 C
O2 and Ar gas inlets for reactive deposition (MFC controlled)
Laser diode coating flip fixture allows multiple coating during a single pump down cycle
Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
Denton |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
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| Reservations |
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| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
