AIM-04: Hitachi SU-70 FEG SEM

June 16, 2021 UMD Home NanoCenter FabLab

Back to Equipment List Hitachi SU-70 FEG SEM

Description

The Hitachi SU-70 Schottky field emission gun scanning electron microscope is a state-of-the-art SEM for ultra-high resolution morphological imaging, microstructural study, and fast and precise microchemical analysis, both qualitatively and quantitatively.

Location

AIM Lab | 1237C Kim Eng. Bldg.

Manufacturer

Hitachi SU-70
Link

Staff Contact

Sz-Chian Liou
scliou@umd.edu
301-405-0551

Discussion Link

Metrology Discussion Page
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Reservations

Date	Start	End	User
06/16/2021	11:00 AM	01:00 PM	Kyle Webb
06/16/2021	01:00 PM	02:00 PM	Sz-Chian Liou
06/16/2021	02:30 PM	04:30 PM	Sandra Gutierrez Razo
06/17/2021	02:00 PM	03:30 PM	Miao Guo
06/21/2021	10:00 AM	12:00 PM	Weiran Zhang

Please login to make a reservation.

Logs

	Wed, Jul 07, 2021 - 6:00 pm Sz-Chian Liou View Reservation	EM Power off. Building power maintain on 07/07. Recovery process.
	Tue, Jul 06, 2021 4:00 pm - Sz-Chian Liou View Reservation	EM Power off. Building power maintain on 07/07.
	Mon, Jun 21, 2021 10:00 am - 12:00 pm Weiran Zhang View Reservation
	Thu, Jun 17, 2021 2:00 pm - 3:30 pm Miao Guo View Reservation
	Wed, Jun 16, 2021 2:30 pm - 4:30 pm Sandra Gutierrez Razo View Reservation

SOPs

Manuals

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Recipes