October 26, 2020 UMD Home NanoCenter AIMLab
Maryland NanoCenter FabLab FabLab Teaching Lab

COVID-19 : NanoCenter Operations Information

Updated 6/8/2020

Please read our updates to our operations in FabLab, AIM Lab, and partner labs.

Read more

Welcome

The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.

Classes in FabLab

The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.

Click here to learn more about classes in the lab.


Announcements

Ongoing

FLUORINE ETCHER - Will be back on line 10/29/20. All users will need to be re trained. Mark will need to know the recipe in advance so that it can be transferred and tested.

Ongoing

Posted. 10/07/20. The Oxford Cl2 etcher is back on line.

Ongoing

The PECVD is offline due to electrical issues.

Ongoing

Posted 09/29/20 METRA back on line. New cross over pressure is 325um.

Ongoing

New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.

Ongoing

ALD users- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc.

Ongoing

If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the notes section of your reservation. Otherwise you will be charged for the full rates.

Ongoing

EVG 620 aligner is off line due to a power supply issue. An assessment is being performed and hopefully we will have some answers in January.

Ongoing

REMOVER PG is only too be used in the dedicated stations. Do not remove Remover PG from the beakers. $150/gal

Ongoing

Woollam ellipsometry system is in horizontal mode.

Ongoing

The STS is back online

Using the lab

If you are interested in using the instruments in the lab please complete the steps on the Become a User page. Additionally, introduce yourself to the FabLab staff and discuss your project. This will allow us to understand your needs and develop a plan for your work or research.

Acknowledging NanoCenter and FabLab

The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.

Read how to acknowledge

Hours

The lab is currently operating under Phase 1: Limited Presence restrictions.

Current hours are:
7:00am - 5:00pm
Monday - Friday
by appointment only.

Please contact the appropriate staff to make an appointment.

FabLab Contact Information

Location

2302 Jeong H. Kim Engineering Building

Staff

John Abrahams

Director, FabLab

jabrah@umd.edu
301-405-6664

Jon Hummel

Staff, FabLab

jhummel1@umd.edu
301-405-5017

Tom Loughran

Staff, FabLab

tcl@umd.edu
301-405-3642

Mark Lecates

Staff, FabLab

mlecates@umd.edu
301-405-5197

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Communicate Director: John Abrahams
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