FLUORINE ETCHER - Will be back on line 10/29/20. All users will need to be re trained. Mark will need to know the recipe in advance so that it can be transferred and tested.
Posted. 10/07/20. The Oxford Cl2 etcher is back on line.
The PECVD is offline due to electrical issues.
Posted 09/29/20 METRA back on line. New cross over pressure is 325um.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
ALD users- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the notes section of your reservation. Otherwise you will be charged for the full rates.
EVG 620 aligner is off line due to a power supply issue. An assessment is being performed and hopefully we will have some answers in January.
REMOVER PG is only too be used in the dedicated stations. Do not remove Remover PG from the beakers. $150/gal
Woollam ellipsometry system is in horizontal mode.
The STS is back online
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
The lab is currently operating under Phase 1: Limited Presence restrictions.
Current hours are:
7:00am - 5:00pm
Monday - Friday
by appointment only.
Please contact the appropriate staff to make an appointment.