June 30, 2025 UMD Home NanoCenter FabLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Link
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Reservations
Date Start End User
07/01/2025 02:00 PM 05:00 PM Veera Chaitanya Rutvik Davuluri
07/02/2025 01:00 PM 03:00 PM Zihan Sun

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Logs
Wed, Jul 02, 2025
1:00 pm - 3:00 pm
Zihan Sun
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Tue, Jul 01, 2025
2:00 pm - 5:00 pm
Veera Chaitanya Rutvik Davuluri
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Fri, Jun 27, 2025
3:00 pm - 5:30 pm
Hanyu Liu
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Fri, Jun 27, 2025
1:00 pm - 3:00 pm
Allen Sun
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Fri, Jun 27, 2025
11:30 am - 12:30 pm
Nicholas Lockhart
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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