July 15, 2025 UMD Home NanoCenter FabLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Link
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Reservations
Date Start End User
07/16/2025 03:00 PM 05:00 PM Veera Chaitanya Rutvik Davuluri
07/17/2025 09:30 AM 11:30 AM Zihan Sun
07/17/2025 12:00 PM 04:00 PM Jess Garnett

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Thu, Jul 17, 2025
12:00 pm - 4:00 pm
Jess Garnett
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Thu, Jul 17, 2025
9:30 am - 11:30 am
Zihan Sun
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Wed, Jul 16, 2025
3:00 pm - 5:00 pm
Veera Chaitanya Rutvik Davuluri
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Tue, Jul 15, 2025
2:00 pm - 5:00 pm
Veera Chaitanya Rutvik Davuluri
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Tue, Jul 15, 2025
12:00 pm - 2:00 pm
Jonathan Martin
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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