June 16, 2021 UMD Home NanoCenter FabLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Link
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Discussion Link Metrology Discussion Page
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Reservations
Date Start End User
06/16/2021 12:00 PM 02:00 PM Mohammad Habibur Rahaman
06/16/2021 02:30 PM 04:00 PM Kaitlyn Watson
06/17/2021 10:00 AM 12:00 PM Gang Chen
06/17/2021 01:00 PM 04:00 PM Yusra Anwar
07/06/2021 05:00 PM 12:00 AM Jiancun Rao

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Logs
Thu, Jul 08, 2021
8:00 am - 12:00 pm
Jiancun Rao
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FEG starting and system check
Wed, Jul 07, 2021
-
Jiancun Rao
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EM Power off. Building power maintain on 07/07. Recovery process.
Tue, Jul 06, 2021
5:00 pm -
Jiancun Rao
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EM Power off. Building power maintain on 07/07.
Thu, Jun 17, 2021
1:00 pm - 4:00 pm
Yusra Anwar
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Thu, Jun 17, 2021
10:00 am - 12:00 pm
Gang Chen
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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