June 16, 2021 UMD Home NanoCenter FabLab
Back to Equipment List Tescan XEIA Plasma FIB/SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Link
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Discussion Link Metrology Discussion Page
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Logs
Sun, Dec 13, 2020
-
Wen-An Chiou
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Power Outage (IDEA Factory Construction)
Sat, Dec 12, 2020
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Wen-An Chiou
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Power Outage (IDEA Factory Construction)
Mon, Nov 23, 2020
12:00 pm - 3:00 pm
Jiancun Rao
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Deleted by: Wen-An Chiou

SEM alignment at 3 kV and 30 kV. FIB test
Mon, Nov 23, 2020
12:00 pm - 3:00 pm
Wen-An Chiou
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SEM alignment at 3 kV and 30 kV. FIB test
Mon, Nov 23, 2020
- 12:00 pm
Wen-An Chiou
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AIM Lab Maintenance (Tescan, David Cernoch)
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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