|Tool Type||UMCP||External Non-Profit / University||Small Commercial / MTECH||Large Commercial|
|E-beam - Raith||41
|SEM - Hitachi||24||37||57||110|
|SEM - JEOL||23||35||57||110|
|Wafer Probe Station, Dicing Saw, Glove Box||25||38||58||124|
|EBL - Ellionix||85||130||250||250|
The Maryland NanoCenter FabLab is a Shared Experimental Facility and is open to serve the research needs for members of the campus community, University of Maryland System Schools, outside universities, government agencies, and commercial organizations.
All rates in are in $/hour.
(1) Rate for Raith eLine system runs of 6 hours or less. For runs longer than six hours, the first six hours will be charged at the published rate and any hours over six hours will be charged at 50% of the regular rate.
(2) Rate for JEOL system rate is 20% less than the Raith.
(3) Rate for first 4 hours with each additional hour in ($).