June 16, 2024 UMD Home NanoCenter AIMLab

Current Rates

Tool UMD External Non-Profit / University Small Commercial / MTECH Large Commercial
Process Tools 81 126 166 242
Raith E-Beam1 47 73 103 182
Inspection 43 67 97 176
Hitachi SEM 27 42 63 133
Porosimeter 20 31 51 74
Backside Tools 28 44 64 150
Inspection 43 67 97 176
Staff Technical Assistance Time 40 62 67 79

All rates in are in $/hour.

Rates are determined by the type of organization from which the funds are paid.

(1) Rate for Raith eLine system runs of 6 hours or less. For runs longer than six hours, the first six hours will be charged at the published rate and any hours over six hours will be charged at 50% of the regular rate.

Last modified: January 9, 2024 8:38 am

The Maryland NanoCenter FabLab is a Shared Experimental Facility and is open to serve the research needs for members of the campus community, University of Maryland System Schools, outside universities, government agencies, and commercial organizations.

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Communicate Director: John Abrahams
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