December 14, 2017 UMD Home NanoCenter AIMLab
Tool Type UMCP External Non-Profit / University Small Commercial / MTECH Large Commercial
Process Tools 71 108 150 200
E-beam - Raith 41
(20.50)
63
(31.50)
93
(46.50)
150
(75)
E-beam JEOL 33
(16.50)
51
(25.50)
75
(37.50)
120
(60)
SEM - Hitachi 24 37 57 110
SEM - JEOL 23 35 57 110
Porosimeter 17
(5)
26
(7)
46.2
(14)
61
(18)
Wafer Probe Station, Dicing Saw, Glove Box 25 38 58 124
NT-MDT 32 49 75 80
Horiba UV-Vis 32 49 75 80
Shimadzu FTIR 32 49 75 80
EBL - Ellionix 85 130 250 250

The Maryland NanoCenter FabLab is a Shared Experimental Facility and is open to serve the research needs for members of the campus community, University of Maryland System Schools, outside universities, government agencies, and commercial organizations.

All rates in are in $/hour.

(1) Rate for Raith eLine system runs of 6 hours or less. For runs longer than six hours, the first six hours will be charged at the published rate and any hours over six hours will be charged at 50% of the regular rate.

(2) Rate for JEOL system rate is 20% less than the Raith.

(3) Rate for first 4 hours with each additional hour in ($).

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AIM Lab Fees

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FabLab
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Communicate Director: Jim O'Connor
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