| Tool | Internal | External University/Government | Small Commercial | Large Commercial |
|---|---|---|---|---|
| Process Tools | 81 | 126 | 166 | 242 |
| Raith E-Beam1 | 47 | 73 | 103 | 182 |
| Inspection | 43 | 67 | 97 | 176 |
| Hitachi SEM | 27 | 42 | 63 | 133 |
| Porosimeter | 20 | 31 | 51 | 74 |
| Backside Tools | 28 | 44 | 64 | 150 |
| Inspection | 43 | 67 | 97 | 176 |
| Staff Technical Assistance Time 2 | 40 | 62 | 67 | 79 |
| Tool | Internal | External University/Government | Small Commercial | Large Commercial |
|---|---|---|---|---|
| Process Tools | 85 | 132 | 174 | 252 |
| Raith E-Beam1 | 50 | 78 | 110 | 194 |
| Hitachi SEM | 30 | 47 | 70 | 148 |
| New Oxford | 98 | 153 | 202 | 293 |
| Analysis Tools | 22 | 34 | 56 | 81 |
| Backside Tools | 32 | 50 | 73 | 171 |
| Process Support Tools | 11 | 13 | 17 | 28 |
| Inspection | 45 | 70 | 102 | 184 |
| Staff Technical Assistance Time 2 | 40 | 62 | 67 | 79 |
All rates in are in $/hour.
Rates are determined by the type of organization from which the funds are paid.
(1) Rate for Raith eLine system runs of 6 hours or less. For runs longer than six hours, the first six hours will be charged at the published rate and any hours over six hours will be charged at 50% of the regular rate.
(2) Rate for Staff Technical Assistance Time is based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services to users of the lab.
Last modified: August 17, 2026 10:26 pm
The Maryland NanoCenter FabLab is a Shared Experimental Facility and is open to serve the research needs for members of the campus community, University of Maryland System Schools, outside universities, government agencies, and commercial organizations.
