February 4, 2023 UMD Home NanoCenter AIMLab

Ongoing

The Ozone generator for the ALD is not running at this time so V2O5 will only run with H2O precursor..

Ongoing

Precious Metal Palladium (Pd) has increased to $100/100nm - 10-1-22

Ongoing

Both Dicing Saws are back in operation.

Ongoing

Micromeritics ASAP replacement pump has been installed. The system should be functioning and can now be used.

Ongoing

Tystar SiO2 and Si3N4 are operational. Poly Si is not at this time.

Ongoing

New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.

Ongoing

If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.

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