June 16, 2024 UMD Home NanoCenter AIMLab

Ongoing

For those using the Cl and F Oxford etchers, if you are cleaning/conditioning the chamber before your actual sample, you may remove up to 30 minutes of your reservation after your session. It is expected for the users to modify it within 8hrs of when the reservation started. Failure to do so will result in standard charge rate for those times. Staff will NOT change this after the modification window.

Ongoing

The BET system now back in operation! Due to the issues found during the repair, all samples must be prebaked at least over 100C overnight before degassing even . Any material that cannot be heated above 100C must be approved by the staff beforehand. Failure to do so will lead to the tool failure again. All sample tubes must be checked in/out. Its expected for users to take back their samples after analysis and return clean sample tubes. Contact Nam for further detail.

Ongoing

Beneq ALD TMA precursor was refilled with limited amount. More is one the way. Notify the staff if you notice low/no pulses. Once additional TMA arrives, the tool will be taken offline again for short period of time. If you notice the reactor pressure greater than 5 mbar, notify the staff immediately.

Ongoing

New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.

Ongoing

If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.

Ongoing

External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.

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