DEP-01: AJA ATC 1800 Sputtering unit

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Back to Equipment List AJA ATC 1800 Sputtering unit

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - Cu, 3 - TiNiCu
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $200 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
01/20/2026	09:00 AM	10:00 AM	Sukanya Goswami

Please login to make a reservation.

External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs

	Tue, Jan 20, 2026 9:00 am - 10:00 am Sukanya Goswami View Reservation	Si Ti Au
	Mon, Jan 19, 2026 10:00 am - 4:00 pm Lyanne Rivera Vazquez View Reservation	Deleted by: Lyanne Rivera Vazquez Al2O3/Ag. Please place clean chimney. Due to nonstandard sample, Jon will have to place sample directly in the internal chamber (not via loading chamber).
	Fri, Jan 16, 2026 9:00 am - 10:00 am Leon Stevenson View Reservation	Cu, Cr
	Thu, Jan 15, 2026 10:00 am - 1:00 pm Lyanne Rivera Vazquez View Reservation	Al2O3/Ag/ Inc. With overnight pump and clean Al2O3 chimney. In addition, need to coordinate with Jon the prism that will be coated with the fixture since that needs to be installed by opening the inst... more
	Tue, Jan 13, 2026 9:30 am - 7:00 pm Sheng-Wei Wang View Reservation	TiNiCu, Ti, Cu

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)