February 22, 2018 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Al2O3, 2-Mg, 3-Si Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Deposition Discussion Page
Login Help
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Thu, Feb 22, 2018
1:00 pm - 3:30 pm
Kham Inboune
View Reservation
300nm Si
Tue, Feb 20, 2018
4:30 pm -
Angelique Jarry
View Reservation

Deleted by: Angelique Jarry

LCO dvlpt Gold charge: Au 40s: $37
Mon, Feb 19, 2018
2:30 pm - 3:00 pm
Chen Gong
View Reservation
Mg
Mon, Feb 19, 2018
12:00 pm - 12:30 pm
Chen Gong
View Reservation
Mg
Mon, Feb 19, 2018
11:30 am - 12:00 pm
Chen Gong
View Reservation
Mg
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: Jim O'Connor
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2018 Privacy Policy
Sitemap