August 3, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - V, 2 - SiO2, 3 - AgPdCu
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact DanielDaniel Lewis
dlewis17@umd.edu
301-405-5018
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
Reservations
Date Start End User
08/04/2026 10:00 AM 12:00 PM Brandon Zink

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Aug 04, 2026
10:00 am - 12:00 pm
Brandon Zink
View Reservation
Al, SiO2 Training with Daniel Lewis
Mon, Aug 03, 2026
- 7:00 am
Daniel Lewis
View Reservation
No target changes without Dr. Kim's approval
Fri, Jul 31, 2026
3:00 pm - 5:00 pm
Lyanne Rivera Vazquez
View Reservation
Targets: Inconel. [Backup reservation]
Fri, Jul 31, 2026
10:00 am - 12:30 pm
Lyanne Rivera Vazquez
View Reservation

Deleted by: Lyanne Rivera Vazquez

Targets: Inconel
Fri, Jul 31, 2026
9:00 am - 12:00 pm
Lyanne Rivera Vazquez
View Reservation
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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