November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description There is a new gate valve on the load lock. Please see Jon Hummel before operating. ,p> First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-Ti, 2-Al2O3, 3-Cr Please email Jon Hummel at if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Staff Contact JonathanJonathan Hummel
301 405-5017
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Tue, Nov 23, 2021
12:00 pm - 12:00 pm
Jonathan Hummel
View Reservation
building power outage 11/26 -11/28 All tools will be shutdown starting at 12 pm 11/23 and restarted Monday morning 11/29.
Mon, Nov 22, 2021
4:15 pm - 6:15 pm
Xiangyu Mao
View Reservation
350A TiO2, 50A Al2O3, 500A Pt, $35
Mon, Nov 22, 2021
3:30 pm - 4:00 pm
Xiangyu Mao
View Reservation
Continuation of reservation sc16197dc15d4e58
Mon, Nov 22, 2021
10:30 am - 12:30 pm
Xiangyu Mao
View Reservation
350A TiO2, 50A Al2O3, 500A Pt, $35
Fri, Nov 19, 2021
9:30 am - 11:00 am
Sam Norris
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Al203, Cr
Records to show:
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)

You must have reservation permissions to view the manuals. Please login to view manuals.


Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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