August 23, 2019 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Au, 2-Pt, 3-Ag Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Reservations
Date Start End User
08/26/2019 09:00 AM 11:30 AM H M Iftekhar Jaim
08/26/2019 01:30 PM 02:30 PM Sarvenaz Memarzadeh
08/27/2019 09:00 AM 10:00 AM Sanwei Liu
08/28/2019 10:00 AM 11:30 AM H M Iftekhar Jaim

Please login to make a reservation.
Logs
Wed, Aug 28, 2019
10:00 am - 11:30 am
H M Iftekhar Jaim
View Reservation
Al2O3, Inconel,Fe Requires overnight pumpdown
Tue, Aug 27, 2019
9:00 am - 10:00 am
Sanwei Liu
View Reservation
Ti Au
Mon, Aug 26, 2019
1:30 pm - 2:30 pm
Sarvenaz Memarzadeh
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Ag, Au
Mon, Aug 26, 2019
9:00 am - 11:30 am
H M Iftekhar Jaim
View Reservation
Al2O3, Inconel, Fe
Fri, Aug 23, 2019
1:00 pm - 3:00 pm
Lisa Krayer
View Reservation
Au and Pt
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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