January 18, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description There is a new gate valve on the load lock. Please see Jon Hummel before operating. ,p>

Targets 1-ITO, 2-Vn, 3-Al Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.


First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial.


For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)


Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Reservations
Date Start End User
01/21/2020 10:00 AM 10:45 AM Clifton Buxbaum
01/22/2020 09:45 AM 10:15 AM H M Iftekhar Jaim
01/23/2020 10:00 AM 11:00 AM Angelique Jarry

Please login to make a reservation.
Logs
Thu, Jan 23, 2020
10:00 am - 11:00 am
Angelique Jarry
View Reservation
Vanadium and lipon
Wed, Jan 22, 2020
9:45 am - 10:15 am
H M Iftekhar Jaim
View Reservation
Al2O3 & Fe
Tue, Jan 21, 2020
10:00 am - 10:45 am
Clifton Buxbaum
View Reservation
Ag
Fri, Jan 17, 2020
12:00 pm - 2:00 pm
Stefan Theodoru
View Reservation
Fri, Jan 17, 2020
9:00 am - 12:00 pm
Stefan Theodoru
View Reservation
ITO
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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