November 21, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Fe, 2-V, 3-Al Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Deposition Discussion Page
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Logs
Tue, Nov 21, 2017
7:45 am - 8:15 am
Jonathan Hummel
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Mon, Nov 20, 2017
11:00 am - 2:15 pm
Nadine Acuna
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Al2O3, Ag, Fe
Fri, Nov 17, 2017
10:00 am - 10:30 am
Thomas Mumford
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SiO2
Fri, Nov 17, 2017
9:30 am - 10:30 am
Seunghun Lee
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Deleted by: Seunghun Lee

In-situ cleaning & Au deposition (50 nm)
Fri, Nov 17, 2017
7:00 am - 9:00 am
Jonathan Hummel
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Deleted by: Jonathan Hummel

Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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