September 26, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Mg, 2-ITO, 3-Ag Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Deposition Discussion Page
Login Help
Reservations
Date Start End User
09/26/2017 12:30 PM 02:00 PM Sheung Lu
09/26/2017 03:30 PM 04:00 PM Bathiya Senevirathna

Please login to make a reservation.
Logs
Tue, Sep 26, 2017
3:30 pm - 4:00 pm
Bathiya Senevirathna
View Reservation
Cu
Tue, Sep 26, 2017
12:30 pm - 2:00 pm
Sheung Lu
View Reservation
Cu
Tue, Sep 26, 2017
9:00 am - 11:00 am
Yevgeniy Ostrovskiy
View Reservation

Deleted by: Jonathan Hummel

Mon, Sep 25, 2017
2:00 pm - 3:00 pm
Yonggang Yao
View Reservation
Mg
Mon, Sep 25, 2017
9:00 am - 11:00 am
Kelsey Gray
View Reservation
ITO
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: Jim O'Connor
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2017 Privacy Policy
Sitemap