March 15, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Al, 2 - ITO, 3 - Ag
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $200 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
03/16/2026 11:00 AM 01:00 PM Hongyi Sun
03/23/2026 08:00 AM 02:00 PM Florencia Petracci

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Mon, Mar 23, 2026
8:00 am - 2:00 pm
Florencia Petracci
View Reservation
V, Au
Mon, Mar 16, 2026
11:00 am - 1:00 pm
Hongyi Sun
View Reservation
Al, Ag, ITO
Fri, Mar 13, 2026
10:30 am - 11:00 am
Hongyi Sun
View Reservation
SiO2
Thu, Mar 12, 2026
8:00 am - 1:00 pm
Florencia Petracci
View Reservation

Deleted by: Jonathan Hummel

V Au
Mon, Mar 09, 2026
8:00 am - 2:00 pm
Florencia Petracci
View Reservation

Deleted by: Jonathan Hummel

V and Au.
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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