May 1, 2025 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1- Al, 2-ITO, 3-Cu
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $110 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
05/01/2025 04:00 PM 05:00 PM Hongyi Sun
05/02/2025 09:00 AM 11:30 AM Lyanne Rivera Vazquez
05/02/2025 12:00 PM 01:30 PM Yi-Siou Huang

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, May 02, 2025
12:00 pm - 1:30 pm
Yi-Siou Huang
View Reservation
AlN
Fri, May 02, 2025
9:00 am - 3:00 pm
Lisa Hanke
View Reservation

Deleted by: Jonathan Hummel

TiHF Ti, Cu
Fri, May 02, 2025
9:00 am - 11:30 am
Lyanne Rivera Vazquez
View Reservation
Al/Fe
Thu, May 01, 2025
4:00 pm - 5:00 pm
Hongyi Sun
View Reservation
Cu,Al,Ag
Thu, May 01, 2025
9:00 am - 3:00 pm
Lisa Hanke
View Reservation

Deleted by: Jonathan Hummel

TIHf, Ti, Cu
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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