The Temescal Electron Beam Deposition System is a 4-pocket ebeam evaporator. A versatile process tool, it is configured to hold anything from small samples up to twelve 3" or eight 4" wafers at a time. Four source pockets allow multiple layer thin film depositions in a single pumpdown cycle.
This tool is primarily used for metals deposition, including chromium, gold, titanium and aluminum.
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Evaporation Recipesevapguide.pdf (180.42 KB)