February 4, 2023 UMD Home NanoCenter AIMLab
Back to Equipment List Temescal Ebeam Deposition
Description The Temescal Electron Beam Deposition System is a 4-pocket ebeam evaporator. A versatile process tool, it is configured to hold anything from small samples up to twelve 3" or eight 4" wafers at a time. Four source pockets allow multiple layer thin film depositions in a single pumpdown cycle.

This tool is primarily used for metals deposition, including chromium, gold, titanium and aluminum.
Location FabLab | DEP Tunnel
Manufacturer Temescal BJD-1800
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Sep 22, 2015
12:00 pm - 3:00 pm
Hyun-Tae Kim
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1.0 um of thermal wet oxide on 10, 4" wafers.
Mon, Aug 11, 2014
3:00 pm - 4:30 pm
Hyung Bae
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TiO2 deposition (thickness: 142 nm)
Mon, Aug 04, 2014
3:00 pm - 4:30 pm
Tao Gong
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Al deposition
Fri, Aug 01, 2014
4:00 pm - 5:00 pm
Wenzhong Bao
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Fri, Aug 01, 2014
9:00 am - 11:00 am
Thomas Loughran
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Records to show:
SOPs
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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