|Description||The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.|
|Location||FabLab | Teaching Lab|
Karl Suss America Inc. MJB-3
|Discussion Link||Lithography Discussion Page
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