July 12, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Jul 11, 2025
10:30 am - 1:30 pm
Stefan Theodoru
View Reservation
50 nm Au = $70
Fri, Jul 11, 2025
7:00 am - 10:00 am
Stefan Theodoru
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60nm Au Gold charge=$84
Thu, Jul 10, 2025
3:30 pm - 5:30 pm
Soumadeep Saha
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Cr(5nm)/Au(70nm) Gold charge=$98
Wed, Jul 09, 2025
6:30 pm - 9:30 pm
Shanchuan Liang
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Cr/Au 5/50 nm Gold charge=$70
Wed, Jul 09, 2025
2:00 pm - 3:30 pm
Liuxin Gu
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Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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