July 18, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu . It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $300 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact DanielDaniel Lewis
dlewis17@umd.edu
301-405-5018
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Wed, Jul 15, 2026
8:00 pm - 9:30 pm
Yuwei Sun
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45 nm Au = $135
Mon, Jul 13, 2026
5:30 pm - 7:30 pm
Rosalin Mohanty
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5nm Cr and 25 nm Au Gold charge=$75
Mon, Jul 13, 2026
11:00 am - 12:30 pm
Yuwei Sun
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5nm Cr + 25nm Au Gold charge=$75
Fri, Jul 10, 2026
3:00 pm - 5:00 pm
Yuwei Sun
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Deleted by: Yuwei Sun

Cr 5nm+Au 25nm = $75
Mon, Jul 06, 2026
2:00 pm - 4:00 pm
Joshua Wang
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5 nm Cr and 7 nm Au Gold charge=$21
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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