September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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Logs
Mon, Mar 23, 2020
7:00 am - 9:00 am
Zhongjie Huang
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1K au Gold charge=$82
Thu, Mar 19, 2020
12:00 pm - 2:00 pm
Zhongjie Huang
View Reservation
1k Au Gold charge=$82
Wed, Mar 18, 2020
11:00 am - 5:00 pm
Lamar Mair
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5000 A Ag 2 runs
Fri, Mar 13, 2020
9:00 am - 11:00 am
Haotian Wang
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Tue, Mar 10, 2020
2:15 pm - 3:45 pm
Zhongjie Huang
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Au, 1kA, charge = $82
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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