June 16, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $92 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Thu, Jun 13, 2024
2:45 pm - 4:45 pm
Ti Xie
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Cr/Au 5/50 nm 46$
Thu, Jun 13, 2024
12:00 pm - 2:00 pm
Liuxin Gu
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Tue, Jun 11, 2024
9:00 pm - 11:00 pm
Zhihao Song
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50 nm Au Gold charge=$46
Tue, Jun 11, 2024
12:45 pm - 2:45 pm
Qinqin Wang
View Reservation

Deleted by: Qinqin Wang

ti/au 5/40 nm au 37$
Tue, Jun 11, 2024
1:00 am - 12:00 pm
Thomas Loughran
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Records to show:
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

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