February 4, 2023 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Feb 03, 2023
12:00 pm - 2:00 pm
Ruihao Ni
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Tue, Jan 31, 2023
3:00 pm - 5:45 pm
Beini Gao
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Cr: 30A Au: 700A Gold charge=$64.40
Sat, Jan 28, 2023
12:45 pm - 3:30 pm
Deric Session
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Deleted by: Deric Session

3nm Cr + 70nmAu = $64.40
Sat, Jan 28, 2023
11:45 am - 2:30 pm
Beini Gao
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Deleted by: Beini Gao

Cr: 30A Au: 700A
Fri, Jan 27, 2023
12:00 pm - 2:00 pm
Samuel Deitemyer
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Cr 6nm Au 50nm Gold charge=$46
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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