June 21, 2018 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Reservations No upcoming reservations at this time.
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Logs
Thu, Jun 14, 2018
1:30 pm - 3:30 pm
John Abrahams
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Training Jessa on Metra for Gold deposition. Alice- please add $31 for 500 Ang Gold depsition
Tue, Jun 12, 2018
12:00 pm - 3:00 pm
Subhojit Dutta
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Tue, Jun 12, 2018
9:30 am - 11:30 am
Blake Nuwayhid
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500A of Gold charge $31.50
Mon, Jun 11, 2018
11:30 am - 3:30 pm
Benjamin Barnes
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10nm Cr, 50nm Au. Gold charge=$31.50
Wed, Jun 06, 2018
11:30 am - 1:30 pm
Peng Wang
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Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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