February 22, 2018 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Reservations No upcoming reservations at this time.
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Logs
Wed, Feb 21, 2018
7:45 am - 10:15 am
Kelsey Gray
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Please add 1200A of Au Gold charge=$53.55
Thu, Feb 15, 2018
4:15 pm - 5:45 pm
Zhongjie Huang
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Au, 1000 A, charge $63
Thu, Feb 15, 2018
9:00 am - 11:30 am
Kelsey Gray
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Deleted by: Kelsey Gray

Please add 1200A of Au
Tue, Feb 13, 2018
12:30 pm - 2:30 pm
Zhongjie Huang
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Au, 1 kA, Gold charge= $63
Mon, Feb 12, 2018
12:00 pm - 1:30 pm
John Abrahams
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Training Benjamin Barnes Alice, please add $31 for precious metal costs.
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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