December 1, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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Logs
Tue, Nov 23, 2021
10:00 am - 11:45 pm
Thomas Loughran
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Tue, Nov 23, 2021
- 1:30 am
Ti Xie
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Cr 10nm
Fri, Nov 19, 2021
3:15 pm - 4:45 pm
Ti Xie
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Au/Cr 50/5nm Gold charge=$41
Tue, Nov 16, 2021
6:45 pm - 8:15 pm
Jierui Liang
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Cr 5nm + Au 60nm
Mon, Nov 15, 2021
9:30 am - 11:30 am
Beini Gao
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Cr:30A + Au:700A = $57.4
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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