June 16, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $92 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Thu, Jun 13, 2024
2:45 pm - 4:45 pm
Ti Xie
View Reservation
Cr/Au 5/50 nm 46$
Thu, Jun 13, 2024
12:00 pm - 2:00 pm
Liuxin Gu
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Tue, Jun 11, 2024
9:00 pm - 11:00 pm
Zhihao Song
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50 nm Au Gold charge=$46
Tue, Jun 11, 2024
12:45 pm - 2:45 pm
Qinqin Wang
View Reservation

Deleted by: Qinqin Wang

ti/au 5/40 nm au 37$
Tue, Jun 11, 2024
1:00 am - 12:00 pm
Thomas Loughran
View Reservation
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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