May 1, 2025 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
05/01/2025 07:30 AM 09:00 AM Yixiao Wang

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Thu, May 01, 2025
7:30 am - 9:00 am
Yixiao Wang
View Reservation
Overnight Pump 10nm Cr+70nm Au = $77
Thu, May 01, 2025
7:00 am - 8:30 am
Yixiao Wang
View Reservation

Deleted by: Yixiao Wang

5nm Cr+70 nm Au = $77
Wed, Apr 30, 2025
10:30 pm -
Yixiao Wang
View Reservation

Deleted by: Yixiao Wang

Overnight pump
Wed, Apr 30, 2025
1:00 pm - 2:30 pm
Rundong Ma
View Reservation
Wed, Apr 30, 2025
7:00 am - 8:30 am
Yixiao Wang
View Reservation
Cr 5 nm + Au 50 nm = $55
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: John Abrahams
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2025 Privacy Policy
Sitemap