| Description |
The Strasbaugh 6EC Chemical Mechanical Polisher (CMP) is used to remove thin layers of SiO2 on silicon wafers for planarization of devices and circuits. It is located in the subfab and is only available to users approved by and trained by FabLab staff. |
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| Location | FabLab | Subfab | |||||||||||||||
| Manufacturer |
Strasbaugh 6EC |
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| Staff Contact |
 John Abrahamsjabrah@umd.edu 301-405-5018 |
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| Rates | ||||||||||||||||
| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
