November 21, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List JEOL 6400/Nabity E-beam
Description

Rates are for first 6 hours; additional hours in reservation are billed at 50%

For Ebeam Lithography with Nabity software

Configuration:
- JEOL JSM-6400 Scanning Microscope
- Nabity EBL software on a Dell PC
- Scanservice Corp. Beam Blanker
- Keithley Pico-Ammeter

Location FabLab | Exploratory Lab
Manufacturer JEOL 840/Nabity
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Lithography Discussion Page
Login Help
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Thu, Jun 29, 2017
9:30 am - 11:00 am
Cathleen Needham
View Reservation

Deleted by: Jonathan Hummel

Wed, May 31, 2017
9:00 am - 10:30 am
Cathleen Needham
View Reservation
Mon, May 15, 2017
1:00 pm - 2:00 pm
Cathleen Needham
View Reservation

Deleted by: Jonathan Hummel

Thu, Apr 06, 2017
11:45 am - 12:45 pm
Yilin Wang
View Reservation
Tue, Apr 04, 2017
2:30 pm - 3:30 pm
Yilin Wang
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-02_sop_JEOL_direct_write_ebeam.pdf (347.19 KB)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

PMMA

PMMA_Data_Sheet.pdf (1.14 MB)

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