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| Location | FabLab |
Teaching Lab
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| Staff Contact |
FabLab Staff fablab@umd.edu |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes | Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB) seminconductor_processing_recipes.doc (37.5 KB) silicon_etching_and_cleaning.doc (176 KB) wet_etch_121500.pdf (13.43 KB) |
