| Description |
Working with wet chemicals can be hazardous if you don't follow the proper procedures at all times. Violating procedure risks not only your health but also the health and safety of other users and may result in loss of access to FabLab for an extended period of time. |
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| Location | FabLab |
ETCH Tunnel
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| Staff Contact |
FabLab Staff fablab@umd.edu |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes | Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB) seminconductor_processing_recipes.doc (37.5 KB) silicon_etching_and_cleaning.doc (176 KB) wet_etch_121500.pdf (13.43 KB) |
