February 4, 2023 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Thu, Jan 19, 2023
10:00 am - 2:00 pm
Thomas Loughran
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Mon, Dec 05, 2022
6:15 pm - 7:45 pm
Ti Xie
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5 nm Ni 50 nm Au $46
Mon, Dec 05, 2022
4:30 pm - 6:00 pm
Ti Xie
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50 nm Au $46
Tue, Nov 08, 2022
6:30 pm - 8:00 pm
Ti Xie
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Deleted by: Ti Xie

ITO 10 nm
Sat, Oct 01, 2022
- 1:00 am
Heshan Yu
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Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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