June 16, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source Handles up to 4" diameter substrates Substrate heating to 300 C O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Jun 14, 2024
12:15 pm - 3:45 pm
ZIYANG SHEN
View Reservation

Deleted by: ZIYANG SHEN

Pt 100nm Platinum charge= $70
Fri, Jun 14, 2024
8:45 am - 10:45 am
Daniel Abebe
View Reservation
Wed, Jun 12, 2024
10:30 am - 12:30 pm
Qinqin Wang
View Reservation
GOLD charge $41.00
Tue, Jun 11, 2024
10:30 am - 12:30 pm
Fariba Islam
View Reservation
Gold 100nm Gold charge=$92
Mon, Jun 10, 2024
1:00 pm - 3:00 pm
Hyung Bae
View Reservation
1000A of TiO2 on fiber optic cables.
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: John Abrahams
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2024 Privacy Policy
Sitemap