February 22, 2018 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
Discussion Link Deposition Discussion Page
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Date Start End User
02/23/2018 12:00 PM 03:00 PM Matt DeJarld
02/23/2018 03:00 PM 06:30 PM Matt DeJarld

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Fri, Feb 23, 2018
3:00 pm - 6:30 pm
Matt DeJarld
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Fri, Feb 23, 2018
12:00 pm - 3:00 pm
Matt DeJarld
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Ni - 250 nm
Thu, Feb 22, 2018
3:00 pm - 6:30 pm
Matt DeJarld
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Deleted by: Matt DeJarld

Ni - 500 nm
Thu, Feb 22, 2018
11:00 am - 5:00 pm
Matt DeJarld
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Ni - 750nm
Wed, Feb 21, 2018
2:00 pm - 5:30 pm
Shahriar Aghaeimeibodi
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Records to show:
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

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