June 21, 2018 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 100nm Pt: $70 per 100nm, Pd: $50 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Reservations
Date Start End User
06/21/2018 06:15 PM 07:15 PM Jiahao Zhan
06/22/2018 08:30 AM 09:30 AM Jiahao Zhan
06/22/2018 03:30 PM 06:00 PM Jiahao Zhan

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Logs
Fri, Jun 22, 2018
3:30 pm - 6:00 pm
Jiahao Zhan
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Fri, Jun 22, 2018
8:30 am - 9:30 am
Jiahao Zhan
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Ni 50nm
Thu, Jun 21, 2018
6:15 pm - 7:15 pm
Jiahao Zhan
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Overnight pump down
Thu, Jun 21, 2018
2:15 pm - 6:15 pm
Keshav Rajasekaran
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Deleted by: Keshav Rajasekaran

Wed, Jun 20, 2018
10:00 am - 12:30 pm
Jiahao Zhan
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Deleted by: Jiahao Zhan

Ni 50nm
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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