September 26, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Logs
Mon, Sep 25, 2017
2:00 pm - 4:45 pm
Jonathan Vannucci
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44.10 Gold Charge
Tue, Sep 19, 2017
2:30 pm - 4:30 pm
Beibei Xu
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Gold charge=$7.56
Thu, Sep 14, 2017
12:00 pm -
Thomas Loughran
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e-gun water leak issue
Thu, Sep 14, 2017
9:30 am - 12:00 pm
Jonathan Vannucci
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Deleted by: Jonathan Vannucci

44.10 gold charge
Mon, Sep 11, 2017
4:15 pm - 6:15 pm
Beibei Xu
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Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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