June 16, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source Handles up to 4" diameter substrates Substrate heating to 300 C O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Fri, Jun 14, 2024
12:15 pm - 3:45 pm
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Deleted by: ZIYANG SHEN

Pt 100nm Platinum charge= $70
Fri, Jun 14, 2024
8:45 am - 10:45 am
Daniel Abebe
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Wed, Jun 12, 2024
10:30 am - 12:30 pm
Qinqin Wang
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GOLD charge $41.00
Tue, Jun 11, 2024
10:30 am - 12:30 pm
Fariba Islam
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Gold 100nm Gold charge=$92
Mon, Jun 10, 2024
1:00 pm - 3:00 pm
Hyung Bae
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1000A of TiO2 on fiber optic cables.
Records to show:
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

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