| Description |
The custom-built Denton Evaporator is a multi source evaporator with the following features:
4-pocket electron beam evaporation source
Handles up to one (1) 4" diameter substrate
Substrate heating to 300 C (temporarily inoperative)
MFC-controlled O2 and Ar gas inlets for reactive deposition (temporarily inoperative)
Precious metals surcharge(10/11): Au: $300 per 100nm Pt: $100 per 100nm, Pd: $110 per 100nm |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
Denton |
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| Staff Contact |
 Daniel Lewisdlewis17@umd.edu 301-405-5018 |
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| Rates | Large Commercial $242/hr UMD $81/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
dep-03_denton_operating_manual.pdf (412.83 KB)
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| Recipes |
