November 21, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
Discussion Link Deposition Discussion Page
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Reservations No upcoming reservations at this time.
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Fri, Nov 17, 2017
10:00 am - 3:00 pm
Zackery Benson
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Ag/SiO2/Mg deposition
Thu, Nov 16, 2017
6:15 pm - 9:15 pm
Xinyuan Chong
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55nm Au ($34.65)
Thu, Nov 16, 2017
9:30 am - 12:30 pm
Zackery Benson
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SiO2 deposition
Wed, Nov 15, 2017
4:00 pm - 5:30 pm
Xinyuan Chong
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Extend previous reservation for cooling
Wed, Nov 15, 2017
12:30 pm - 3:30 pm
Xinyuan Chong
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Pt 100nm ($70)
Records to show:
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

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