September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $82 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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Logs
Thu, Sep 24, 2020
2:00 pm - 4:00 pm
JAYAPRAKASH POOJALI
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gold charge. $41.00
Tue, Sep 22, 2020
8:00 am - 10:30 am
HANHO LEE
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Tom
Mon, Sep 21, 2020
12:30 pm - 11:45 pm
Thomas Loughran
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Fri, Sep 18, 2020
1:00 pm - 2:00 pm
JAYAPRAKASH POOJALI
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Deleted by: Thomas Loughran

gold charge $41.00
Fri, Sep 18, 2020
11:00 am - 1:00 pm
JAYAPRAKASH POOJALI
View Reservation
Gold charge $41.00 tom
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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