November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Raith e_LiNE
Description The Raith e_line is a versatile e-beam system for nano structuring, patterning and imaging using a Thermal Field Emission filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides that can range over multiple millimeter distances. The electron column has a unique cross over free beam path that give high beam current and exceedingly low aberrations for top quality patterning and unsurpassed low voltage imaging even below 1keV.

For runs longer than 4-5 hours please start your run in the evening and let it run over night.

Location FabLab | Exploratory Lab SEM room
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Tue, Nov 23, 2021
12:00 pm - 9:00 am
Jonathan Hummel
View Reservation
power outage.
Tue, Nov 23, 2021
9:30 am - 11:45 am
Kungang Li
View Reservation
Mon, Nov 22, 2021
7:45 pm - 9:00 pm
Ti Xie
View Reservation
Mon, Nov 22, 2021
10:30 am - 11:30 am
Nam Kim
View Reservation
Mon, Nov 22, 2021
7:00 am - 8:30 am
Benjamin Barnes
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: John Abrahams
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2021 Privacy Policy
Sitemap