November 21, 2017 UMD Home NanoCenter AIMLab
Description Out of Service indefinitely. Always check with John Abrahams before scheduling RTA 410 as alternatinve. The HEATPULSE 410 is rapid thermal processor systems which use high intensity visible radiation to heat single substrates for short periods (typically 1-6,000 seconds although up to 9,999 seconds is available) at precisely controlled temperatures. Key features include: - Closed loop temperature control with thermocouple temp sensing - Precise time-temperature profiles tailored to specific processes - Rapid heating and cooling rates - Consistent sample-to-sample process cycle repeatability - An extensive library of proven recipes Clean chamber is installed. AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 4" using Thermocouple to 700 degrees Celsius or Pyrometer above 800. Be sure to check status of chamber. There is a clean- only chamber and there is a "dirty" chamber. Give me notice and allow time for change-over at 301-405-6664.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 410
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
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cvd-01 Rapid Thermal Annealer 410.pdf (671.6 KB)
index.php (38 B)
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