December 1, 2021 UMD Home NanoCenter AIMLab
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 800 degrees Celsius or Pyrometer above 800.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Reservations No upcoming reservations at this time.
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Logs
Fri, Oct 29, 2021
9:45 am - 10:30 am
Mitchell Gross
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Tue, Jul 27, 2021
9:30 am - 9:45 am
Brett Setera
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Fri, Jun 11, 2021
10:00 am - 11:00 am
Daniel Lewis
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Training and 600 C run with Argon
Fri, May 28, 2021
10:15 am - 10:45 am
Mitchell Gross
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Tue, May 25, 2021
1:30 pm - 2:00 pm
Mitchell Gross
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1000C anneal
Records to show:
SOPs
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)
Manuals

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Recipes

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