| Description |
This Oxford Plasmalab System 100 is an Inductively Coupled Plasma (ICP) reactive ion etcher. Gases plumbed to the system include:
The standard operating procedure for this tool is loaded into the PC that supports the ICP etcher. |
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| Location | FabLab |
ETCH Tunnel
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| Manufacturer |
Oxford Instruments |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
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| Reservations |
Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes | Oxford Etch RecipesAL2O3ICP180_BCl3-HBr.doc (48 KB)AlGaN_GaN Etch Recipe.tif (225.63 KB) GaAs_AlGaAs Etch Recipe.tif (277.68 KB) InP Etch Recipe.tif (223.57 KB) MgO Etch Recipe.doc (27.5 KB) |
