|Description||The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Titanium Nitride and Zinc Oxide deposition. Warning: This system uses flammable materials such as Tri-Methyl Aluminum. Operation is limited to users approved and trained by FabLab staff. We have all precursors back in operation as of 3-7-2017|
|Location||FabLab | CVD Tunnel|
Beneq TFS 500 ALD
|Discussion Link||Deposition Discussion Page
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