November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Atomic Layer Deposition System
Description

Do NOT SAVE RECIPES- there is a software glitch that removes all recipes if you save- No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($75/hour for UMD use, $116 Non- profit/University, $158- Small commercial, $220- Large commercial) followed by $35/hour after that.

Vanadium Oxides at standard rates ($75/hour for UMD- see above for other organizations) for TWO hours then $10/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Reservations
Date Start End User
11/30/2021 09:00 AM 09:00 AM Steve LeKarz
12/01/2021 09:00 AM 04:00 PM Steve LeKarz

Please login to make a reservation.
Logs
Wed, Dec 01, 2021
9:00 am - 4:00 pm
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder (total 31 hours, see prior reservation)
Tue, Nov 30, 2021
9:00 am - 9:00 am
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder
Tue, Nov 23, 2021
4:00 pm - 5:00 pm
Xizheng Wang
View Reservation
Al2O3
Tue, Nov 23, 2021
11:00 am - 4:00 pm
Shoukang Hong
View Reservation

Deleted by: Shoukang Hong

V2O5
Mon, Nov 22, 2021
11:00 am - 11:00 am
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

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