September 25, 2020 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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Logs
Thu, Sep 24, 2020
7:00 am - 9:00 am
Haotian Wang
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tom
Tue, Sep 22, 2020
8:00 am - 11:00 am
Harsimranjit Singh
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1.0 um of thermal wet oxide. Tom
Thu, Sep 10, 2020
8:00 am - 8:45 am
Shengjie Xie
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1000A of Nitride. Tom
Wed, Sep 09, 2020
9:00 am - 10:00 am
Jiahao Zhan
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tom
Wed, Sep 02, 2020
11:00 am - 12:30 pm
Haotian Wang
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5000A of thermal wet oxide on 4, 4" Si wafers.
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