June 16, 2024 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, May 28, 2024
8:00 am - 4:00 pm
Thomas Loughran
View Reservation
Ying Song - Teledyne
Wed, May 22, 2024
8:00 am - 10:00 am
Leopoldo Tapia-Aracayo
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5000A of thermal wet oxide.
Tue, May 21, 2024
- 2:00 am
Maxwell Xuan
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154nm Si3N4 deposition.
Fri, Apr 26, 2024
10:00 am - 12:00 pm
xiheng ai
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1000A of Si3N4
Mon, Apr 15, 2024
11:00 am - 1:00 pm
Mitchell Gross
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1.5 um of poly
Records to show:
SOPs
Manuals

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Recipes

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