February 4, 2023 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Jan 31, 2023
11:00 am - 1:30 pm
Yang Zhang
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3000A of Si3N4
Tue, Dec 06, 2022
3:30 pm - 7:00 pm
Mitchell Gross
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Low Stress Si3N4 600 nm
Tue, Nov 08, 2022
9:00 am - 11:00 am
John Abrahams
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Doping Drive-In Schottky
Mon, Nov 07, 2022
1:00 pm - 4:30 pm
Hyung Bae
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1095 nm SiO2
Mon, Nov 07, 2022
9:00 am - 11:00 am
xiheng ai
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3K Si3N4
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SOPs
Manuals

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Recipes

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FabLab
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Communicate Director: John Abrahams
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