December 1, 2021 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Reservations No upcoming reservations at this time.
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Logs
Fri, Nov 19, 2021
12:00 pm - 2:00 pm
Mitchell Gross
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anneal
Fri, Nov 19, 2021
9:00 am - 11:00 am
Mitchell Gross
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5000A of Poly.
Fri, Nov 12, 2021
10:00 am -
Thomas Loughran
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Tue, Nov 09, 2021
8:00 am - 10:00 am
Haotian Wang
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2000A of Poly.
Wed, Nov 03, 2021
8:00 am - 10:00 am
Haotian Wang
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Deleted by: Thomas Loughran

1000A of Poly
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Recipes

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