February 22, 2018 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
Discussion Link Deposition Discussion Page
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Reservations No upcoming reservations at this time.
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Wed, Feb 14, 2018
7:00 am - 8:30 am
Shangjie Yu
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500A of dry oxide on 25, 4" Si wafers.
Thu, Jan 18, 2018
7:00 am - 8:00 am
Jessie Zhang
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200A of dry oxide on 12, 4" Si wafers for Luke Robertson. LPS
Wed, Jan 17, 2018
9:30 am - 10:30 am
Xinyuan Chong
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1000A of Nitride.
Wed, Jan 17, 2018
7:00 am - 8:00 am
Jessie Zhang
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6600A of Poly Silicon.
Fri, Jan 12, 2018
10:30 am - 11:00 am
Yiwen Hu
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400A of ST Nitride on 2, 4" wafers with thermal oxide.
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