November 21, 2017 UMD Home NanoCenter AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Logs
Thu, Nov 09, 2017
8:30 am - 9:30 am
Jessie Zhang
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12 hour N2 anneal at 1000C
Fri, Nov 03, 2017
8:00 am - 11:00 am
Jessie Zhang
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3-hour STNitride deposition for Sarit at Advanced Micro Systems.
Tue, Oct 31, 2017
1:00 pm - 2:00 pm
Jessie Zhang
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1-hour anneal at 1000C N2
Thu, Oct 26, 2017
10:00 am - 1:00 pm
Jessie Zhang
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5000A of STNITR on diamond and Silicon for Sarit Zhukovsky. modern microsystems
Wed, Oct 25, 2017
7:00 am - 7:45 am
Yang Zhang
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1000A of 6:1 LSNitride
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