| Description |
The Atomate Nanowire Growth System uses a chemical vapor deposition process to grow doped silicon, germanium, or silicon germanium nanowires.
During growth these structures can be doped with boron or phosphorous resulting in nanoscale diodes and transistors. Carbon based structures
such as nanotubes and grapheme can also be grown but require a change of gases to methane and acetylene. Please see staff to change
gases.
Several hazardous gases are plumbed into this system, including: silane, diborane, phosphine and hydrogen. Extreme care must be exercised by users. |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
Atomate |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
