September 26, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List Nanowire Growth System
Description The Atomate Nanowire Growth System uses a chemical vapor deposition process to grow doped silicon, germanium, or silicon germanium nanowires. During growth these structures can be doped with boron or phosphorous resulting in nanoscale diodes and transistors. Carbon based structures such as nanotubes and grapheme can also be grown but require a change of gases to methane and acetylene. Please see staff to change gases.

Several hazardous gases are plumbed into this system, including: silane, diborane, phosphine and hydrogen. Extreme care must be exercised by users.
Location FabLab | CVD Tunnel
Manufacturer Atomate
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Wed, Sep 28, 2016
9:00 am -
Zoey Warecki
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Thu, Sep 08, 2016
- 9:00 am
Zoey Warecki
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Wed, Sep 07, 2016
3:00 pm -
Zoey Warecki
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Thu, May 12, 2016
12:00 pm - 2:00 pm
Keith Gregorczyk
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Deleted by: Ernie Cleveland

Annealing V2O5
Mon, May 09, 2016
2:30 pm - 3:30 pm
Keith Gregorczyk
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Annealing polyimide at 260C
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