November 21, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List Ellipsometer
Description

The Auto ELIII Ellipsometer is used to measure the optical constants of bare surfaces as well as refractive indices, full-cycle thicknesses, and zero- through ninth-order thicknesses of thin single- or double-layer transparent films on opaque materials. The optical constants are automatically computed and displayed from the raw measurement data.

Location FabLab | Main Fab Hall
Manufacturer Rudolph Auto EL III
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Discussion Link Metrology Discussion Page
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Logs
Fri, Jul 08, 2011
3:00 pm - 4:00 pm
Brad Gordon
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Wed, Jun 22, 2011
3:00 pm - 4:00 pm
Brad Gordon
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Wed, Jun 08, 2011
2:00 pm - 4:00 pm
Brad Gordon
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training
Tue, Jun 07, 2011
2:00 pm - 4:00 pm
Brad Gordon
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Deleted by: Lauren Haspert

training
Mon, Jun 06, 2011
2:00 pm - 4:00 pm
Brad Gordon
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Deleted by: Lauren Haspert

training
Records to show:
SOPs
index.php (38 B)
met-04_sop_ellipsometer_Rudolph.pdf (886.1 KB)
Manuals

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CE_M2K_ESM-300.pdf (12.65 MB)
index.php (38 B)
Recipes

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