September 26, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List XactiX Xenon Difluoride Etcher
Description

XeF2 (xenon difluoride) isotropic silicon etching is particularly well suited to MEMS applications. XeF2 vapor phase etching exhibits nearly infinite selectivity of silicon to photo-resist, silicon dioxide, silicon nitride and aluminum. Being a vapor phase etchant, XeF2 avoids many of the problems typically associated with wet processes.

To use the etcher, simply place your wafer, die, or other structure into the etch chamber, close the lid, set the etching conditions, and press start on the software. The details of the process sequence are captured in the control software, and the user just has to set target etch conditions.

The XactiX xenonn difluoride etcher is used to release MEMs structures. XeF2 shows nearly infinite selectivity to silicon over almost all standard semiconductor materials including photoresist, silicon dioxide, silicon nitride and aluminum.

Location FabLab | ETCH Tunnel
Manufacturer Xactix
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Etching Discussion Page
Login Help
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Thu, Aug 24, 2017
3:15 pm - 3:30 pm
Shahriar Aghaeimeibodi
View Reservation
Mon, Aug 15, 2016
1:30 pm - 2:00 pm
Shahriar Aghaeimeibodi
View Reservation
Tue, Jul 12, 2016
1:30 pm - 2:00 pm
Shahriar Aghaeimeibodi
View Reservation
Wed, Mar 23, 2016
2:00 pm - 3:30 pm
Jonathan Hummel
View Reservation
scroll pump rebuild
Fri, Jan 15, 2016
11:30 am - 12:00 pm
Ivan Penskiy
View Reservation
Records to show:
SOPs
Etch - 15 Xactix Xenon Difluoride Etcher SOP.pdf (866.97 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

index.php (38 B)
Recipes

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: Jim O'Connor
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2017 Privacy Policy
Sitemap