September 26, 2017 UMD Home NanoCenter AIMLab
Back to Equipment List Woollam Spectroscopic Ellipsometer
Description Ellipsometer is in vertical mode. Contact John Abrahams is horizontal is needed.
Rates:

$88/hr - Industry
$42/hr - Gov't/Non-profit/Ext Univ
$35/hr - UMD

Contact: John Abrahams jabrah@umd.edu (301) 405-6664 The J.A. Woollam M-2000D Spectroscopic Ellipsometer, 8” (190-1000nm) is a fully automated measurement tool that measures the optical properties of thin film semiconductor materials, specifically the complex refractive index or dielectric function. Additionally, the Woollam has mapping functionality and the incidence angle can be varied (typically, measurements are made from 60 to 85°). This tool can also measure reflectance and transmission across the entire spectral range.

Wavelength range of the Woollam M-2000D Spectroscopic Eillipsometer

The Woollam is commonly used for analyzing film thicknesses and optical properties of single layer films, but it can also be used to measure the properties of more complex structures such as multi-layers, interface roughness or inhomogeneous layers. The CompleteEASE software program interfaces with the Woollam to perform the measurements. Data can be collected and analyzed within the CompleteEASE program for determining film properties such as band gap, refractive index, extinction coefficient, thickness, and surface roughness. A regression model characterizes a layer with either an n&k model or a dispersion model (laws including Cauchy, Sellmeier, Forouhi and Tauc Lorentz). Models for various common materials have been created, including Al compounds, Ge compounds, glasses, nitrides, oxides, oxynitrides, semiconductor III-V and II-VI materials, silicon, and silicon compounds.

Location FabLab | 2300 KIM (Bldg #225)
Manufacturer J.A. Woollam M-2000D
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Discussion Link Metrology Discussion Page
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Tue, Sep 26, 2017
10:00 am - 10:30 am
John Abrahams
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Training David Somers
Mon, Sep 25, 2017
5:15 am - 5:45 am
Jongbum Kim
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Sun, Sep 24, 2017
11:15 pm - 11:45 pm
Jongbum Kim
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Tue, Sep 19, 2017
9:15 am - 12:00 pm
Chen Gong
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Deleted by: Chen Gong

Mon, Sep 18, 2017
8:00 pm - 9:00 pm
Jongbum Kim
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