August 23, 2019 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-Au, 2-Si P doped, 3-W, 4-LPO, 5-LCO, 6-Cu, 7-Ti, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Reservations
Date Start End User
08/26/2019 09:00 AM 10:00 AM Victoria Castagna Ferrari
08/28/2019 09:00 AM 11:00 AM Kevin Palm

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Logs
Wed, Aug 28, 2019
9:00 am - 11:00 am
Kevin Palm
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Pd Ti
Mon, Aug 26, 2019
9:00 am - 10:00 am
Victoria Castagna Ferrari
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Cr, Au, LiPON, Au
Fri, Aug 23, 2019
9:00 am - 4:00 pm
David Stewart
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LiPON characterization
Thu, Aug 22, 2019
10:00 am - 6:00 pm
Miles Mowbray
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Thu, Aug 22, 2019
9:00 am - 10:00 am
Stefan Theodoru
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Two depositions of: 25nm Ti 100nm Au
Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

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