| Description |
Targets 1-FeF3, 2-Au, 3-Ti, 4-LiO2, 5-Cr, 6-W 7-Li3PO4, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them.
First 2 hours of the run: $81/hr for UMCP NanoCenter members, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.
For runs over 2 hours: $11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)
This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au).
Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges)
Precious metals surcharge(7/18):
Au & Pd: $110 per 1000A
Pt: $100 per 1000A |
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| Location | FabLab |
Dep tunnel
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| Manufacturer |
AJA International ATC Orion 8 |
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| Staff Contact |
 Jonathan Hummeljhummel1@umd.edu 301 405-5017 |
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| Rates | No Charge $0/hr Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr |
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| Reservations |
Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
