January 18, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC Orion 8 Sputtering system
Description Targets 1-Au, 2-V2O5, 3-Si-N P doped, 4-Li2O, 5-LiPO4, 6-Cu, 7-Ti, 8-Al Please email Jon Hummel at jhummel1@umd.edu if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) First 2 hours of the run: $71/hr for UMCP NanoCenter members, $108 for Non-Profit(including government)s, $150 for small commercial; $200 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Reservations
Date Start End User
01/23/2020 09:30 AM 10:00 AM Angelique Jarry

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Logs
Thu, Jan 23, 2020
9:30 am - 10:00 am
Angelique Jarry
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Au (extra charge $41)
Thu, Jan 16, 2020
- 8:30 pm
David Stewart
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~LiPON/LVO/Al
Wed, Jan 15, 2020
11:30 am - 11:45 pm
David Stewart
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Cu/Si/LiPON
Wed, Jan 15, 2020
10:00 am - 10:45 am
Stefan Theodoru
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50nm x2 Au total $82
Tue, Jan 14, 2020
9:00 am - 6:00 pm
Miles Mowbray
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Records to show:
SOPs
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)
Manuals

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Recipes

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