| Description |
The Maskless Aligner MLA 150 is a state-of-the-art maskless lithography tool. Areas of application include nanofabrication of quantum devices (2D materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple grayscale structures. It is available with 375nm and 405nm lasers, have pneumatic autofocus, and is able to pattern from 12mm to 6in wafer. Check with resist manufacturer to find the dosage window. |
||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Location | FabLab | Photolithography Tunnel | ||||||||||||||||||||
| Manufacturer |
Heidelberg MLA 150 |
||||||||||||||||||||
| Staff Contact |
 Nam Kimnsk0248@umd.edu 301-405-6664 |
||||||||||||||||||||
| Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
||||||||||||||||||||
| Reservations |
Please login to make a reservation. |
||||||||||||||||||||
| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
||||||||||||||||||||
| Logs |
|
||||||||||||||||||||
| SOPs |
|
||||||||||||||||||||
| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
|||||||||||||||||||||
| Recipes |
