July 13, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List March O2 plasma system
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Wed, Jul 09, 2025
12:00 pm - 12:15 pm
Sheng-Wei Wang
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Fri, Jul 04, 2025
12:00 pm - 12:15 pm
Sheng-Wei Wang
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Thu, Jul 03, 2025
4:15 pm - 4:30 pm
Yi-Siou Huang
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Thu, Jul 03, 2025
1:30 pm - 1:45 pm
Ti Xie
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Thu, Jul 03, 2025
10:00 am - 10:15 am
Sheng-Wei Wang
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Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

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