April 22, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List March O2 plasma system
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Apr 21, 2026
7:15 pm - 7:30 pm
Tahir Mahmud
View Reservation
Tue, Apr 21, 2026
4:15 pm - 4:30 pm
Tahir Mahmud
View Reservation
Tue, Apr 21, 2026
1:00 pm - 1:45 pm
Kyle Martin
View Reservation
Tue, Apr 21, 2026
8:45 am - 9:00 am
Gage Sabater
View Reservation
Mon, Apr 20, 2026
2:15 pm - 2:30 pm
Henry Gagliardi
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

NanoCenter Group NanoCenter
FabLab
AIM Lab

Communicate Director: Dr. Nam Kim
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2026
Privacy Policy
Sitemap