September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Profilometer Tencor Alpha Step 200- FABLAB
Description The AlphaStep 200 is used to measure thin film thicknesses of less than 100 Å up to 165 microns. It measures the deflection of a stylus as it is drawn over the sample.
Location FabLab | Main Fab Hall
Manufacturer AlphaStep 200
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
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Logs
Fri, Sep 11, 2020
1:00 pm - 2:00 pm
Jaesung Lee
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Wed, Dec 11, 2019
5:45 pm - 6:00 pm
Zhongjie Huang
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Tue, Dec 03, 2019
3:00 pm - 5:00 pm
Keith Gregorczyk
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Deleted by: Keith Gregorczyk

TiN Cl etch
Tue, Sep 24, 2019
5:45 pm - 6:00 pm
Zhongjie Huang
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Fri, Sep 13, 2019
1:15 pm - 1:30 pm
Zhongjie Huang
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Records to show:
SOPs
index.php (38 B)
met-07_sop_alphastep_200.pdf (172.56 KB)
Manuals

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Recipes

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