|Description||The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.|
|Location||FabLab | Exploratory Lab|
SCS Equipment PDS 2010 Labcoter 2
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parylene_manual.pdf (333.07 KB)