September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Link
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Wed, Jan 22, 2020
9:00 am - 12:00 pm
Ryan Huiszoon
View Reservation
2 micron Parylene C device coating
Mon, Oct 07, 2019
7:00 am - 12:00 pm
John Abrahams
View Reservation
1.5 grams
Fri, Oct 04, 2019
12:00 pm - 4:00 pm
John Abrahams
View Reservation
1.5 um deposition on ALD coated samples
Tue, Aug 20, 2019
11:00 am - 2:00 pm
Sanwei Liu
View Reservation
Thu, Aug 15, 2019
10:00 am - 1:00 pm
Ryan Huiszoon
View Reservation
2.5um parylene device coating.
Records to show:
SOPs
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

parylene_manual.pdf (333.07 KB)
Recipes

NanoCenter Group NanoCenter
FabLab
AIMLab

Communicate Director: John Abrahams
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2020 Privacy Policy
Sitemap