November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Staff Contact MarkMark Lecates
Reservations No upcoming reservations at this time.
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Wed, Jan 22, 2020
9:00 am - 12:00 pm
Ryan Huiszoon
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2 micron Parylene C device coating
Mon, Oct 07, 2019
7:00 am - 12:00 pm
John Abrahams
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1.5 grams
Fri, Oct 04, 2019
12:00 pm - 4:00 pm
John Abrahams
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1.5 um deposition on ALD coated samples
Tue, Aug 20, 2019
11:00 am - 2:00 pm
Sanwei Liu
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Thu, Aug 15, 2019
10:00 am - 1:00 pm
Ryan Huiszoon
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2.5um parylene device coating.
Records to show:
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)

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parylene_manual.pdf (333.07 KB)

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