May 21, 2022 UMD Home NanoCenter AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Staff Contact MarkMark Lecates
Reservations No upcoming reservations at this time.
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Tue, May 17, 2022
6:00 pm - 7:30 pm
Ziyi Wang
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Mon, May 16, 2022
12:45 pm - 2:15 pm
Ziyi Wang
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Tue, May 10, 2022
10:00 am - 1:00 pm
Mark Lecates
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Deleted by: Mark Lecates

Fri, May 06, 2022
12:45 pm - 2:15 pm
Ziyi Wang
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Tue, May 03, 2022
3:15 pm - 4:45 pm
Ziyi Wang
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Records to show:
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)

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parylene_manual.pdf (333.07 KB)

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