September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Fri, Sep 25, 2020
12:30 pm - 1:30 pm
Daniel Lewis
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Abrahams-
Thu, Sep 17, 2020
12:15 pm - 4:00 pm
Jacqueline Hines
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Abrahams-
Thu, Sep 17, 2020
8:30 am - 10:30 am
Yang Zhang
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mark
Wed, Sep 16, 2020
3:00 pm - 5:00 pm
Yang Zhang
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Deleted by: Mark Lecates

Wed, Sep 16, 2020
7:45 am - 9:30 am
Benjamin Barnes
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Au-15nm Gold charge=$12.30
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

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