May 21, 2022 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.

This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Wed, May 04, 2022
11:00 am - 12:00 pm
Sean O'Leary
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Tue, May 03, 2022
4:45 pm - 6:00 pm
Sean O'Leary
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Deleted by: Sean O'Leary

Tue, May 03, 2022
9:00 am - 3:30 pm
Sean O'Leary
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Sat, Apr 30, 2022
6:30 pm - 8:30 pm
Jiahao Zhan
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Wed, Apr 27, 2022
11:30 am - 1:30 pm
Mitchell Gross
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Records to show:
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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