November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.

This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Tue, Nov 23, 2021
1:00 pm - 9:00 pm
Mark Lecates
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Deleted by: Mark Lecates

Tue, Nov 23, 2021
12:30 pm - 8:30 pm
Mark Lecates
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Tue, Nov 23, 2021
11:30 am - 1:00 pm
Joseph Brock
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Deleted by: Joseph Brock

Tue, Nov 23, 2021
10:15 am - 11:45 am
Joseph Brock
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Tue, Nov 23, 2021
8:00 am - 9:00 am
Sungha Baek
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Records to show:
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)

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