| Description |
The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / PtHandles up to five 4" diameter substrates |
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| Location | FabLab |
Dep Tunnel
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| Manufacturer |
Angstrom |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
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| Reservations |
Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
