December 13, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals.

Precious metals surcharge(10/11): Au: $200 per 1000A Pt: $100 per 1000A Pd-$110 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Dec 12, 2025
9:30 am - 1:30 pm
Sheng-Wei Wang
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Thu, Dec 11, 2025
9:30 am - 8:15 pm
Jacqueline Hines
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Two metal dep runs - first is Ti/Pt (200 angstroms $20)/Au (2700 angstroms $540); had to re-start pumpdown after installing thermal pad for Pt crucible; second shot - started pumpdown overnight after ... more
Tue, Dec 09, 2025
9:00 am - 11:00 am
Linfeng Ai
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ITO-30nm
Fri, Dec 05, 2025
1:00 pm - 3:00 pm
Maxwell Xuan
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Thu, Dec 04, 2025
10:00 am - 1:00 pm
Noah Kent
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Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

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