DEP-07: Angstrom NexDep Ebeam evaporator

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DEP-07: Angstrom NexDep Ebeam evaporator

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Back to Equipment List Angstrom NexDep Ebeam evaporator

Description

The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.

This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.

Location

FabLab | Dep Tunnel

Manufacturer

Angstrom

Staff Contact

Mark Lecates
mlecates@umd.edu
301-405-5197

Reservations

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Please login to make a reservation.

Logs

	Fri, Sep 25, 2020 12:30 pm - 1:30 pm Daniel Lewis View Reservation	Abrahams-
	Thu, Sep 17, 2020 12:15 pm - 4:00 pm Jacqueline Hines View Reservation	Abrahams-
	Thu, Sep 17, 2020 8:30 am - 10:30 am Yang Zhang View Reservation	mark
	Wed, Sep 16, 2020 3:00 pm - 5:00 pm Yang Zhang View Reservation	Deleted by: Mark Lecates
	Wed, Sep 16, 2020 7:45 am - 9:30 am Benjamin Barnes View Reservation	Au-15nm Gold charge=$12.30

SOPs

Angstrom Rev-1.pdf (1.35 MB)

index.php (38 B)

Manuals

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Recipes