September 25, 2020 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Reservations
Date Start End User
09/29/2020 10:00 AM 02:00 PM Ashley Chapin

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Tue, Sep 29, 2020
10:00 am - 2:00 pm
Ashley Chapin
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mark
Fri, Sep 25, 2020
9:00 am - 1:00 pm
Ashley Chapin
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gold-100nm Gold charge=$82
Thu, Sep 24, 2020
3:30 pm - 4:45 pm
Niloy Acharjee
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Thu, Sep 24, 2020
1:00 pm - 2:15 pm
Niloy Acharjee
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mark
Thu, Sep 24, 2020
9:30 am - 1:00 pm
HANHO LEE
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Gold-300nm Gold charge=$246
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