November 28, 2021 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $82 per 1000A Pt: $70 per 1000A Pd-$82/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
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Tue, Nov 23, 2021
12:30 pm - 8:30 pm
Mark Lecates
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Tue, Nov 23, 2021
8:00 am - 11:00 am
Stefan Theodoru
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Platnium-100nm Platinum - charge=$70
Sun, Nov 21, 2021
10:00 am - 11:00 am
Jiahao Zhan
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Sat, Nov 20, 2021
11:00 pm -
Jiahao Zhan
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Fri, Nov 19, 2021
2:30 pm - 4:00 pm
Joseph Brock
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Deleted by: Joseph Brock

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