May 21, 2022 UMD Home NanoCenter AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Reservations
Date Start End User
05/23/2022 09:30 AM 11:30 AM Mark Lecates

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Logs
Mon, May 23, 2022
9:30 am - 11:30 am
Mark Lecates
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Gold
Fri, May 20, 2022
5:45 pm - 7:15 pm
Soaram Kim
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Au (220nm)
Thu, May 19, 2022
10:45 am - 3:15 pm
xiheng ai
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Wed, May 18, 2022
12:00 pm - 2:00 pm
Ryan Purcell
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Ni
Wed, May 18, 2022
7:30 am - 9:30 am
Mark Lecates
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