Latest Status Update
Updated: 8/8/2025
Please see below for updated instruments status information in the FabLab and the AIMLab.
You will be able to see individual instrument operational status in the NanoCenter equipment list.
https://www.nanocenter.umd.edu/equipment/
Please contact responsible staff for a specific instrument if you have further questions.
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FabLab
- Poly Silicon dep is still on hold due to the gas abatement issue. We are working with the facilities to resolve this issue.
- Denton Ebeam evaporator's part arrived and was installed. It is going through the cryo regen process and should be online early next week.
- The old PECVD system is offline due to loading/unloading issues. We suspect it's the control board. We will be performing further diagnosis to confirm and will be replacing it with a spare board. We expect the tool to come back online early next week as well. If needed, please contact staff for training on the new PECVD system.
- Xenon difluoride etcher's vacuum pump is still out for repair with unknown return date. Please contact staff for an alternative process.
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AIMLab
- JEOL FEG TEM/STEM is in good working condition. The EDS detector has been calibrated and fully operational. Please make sure to retract the detector after usage or ask Lab staff for assistance if you need to use the EDS. The EELS has some issues and the AIM Lab is trying to solve the problem. The Protochips completed the installation of "Atmosphere System" for researchers to carry the in-situ TEM/STEM experiments using the FEG TEM/STEM. The SOP will be prepared and some tests need to be done before open to the general public. Please do not touch/change any setup without informing AIM Lab staff.
- JEOL LaB6 TEM is in good working condition.
- Hitachi SU-70 SEM is in good working condition.
- Tescan FIB/SEM Facility: The XEIA SEM is in normal operation despite XEIA's Plasma FIB requiring more service work. The GAIA SEM is functional except without high resolution SEM mode. The Tescan's FIB/SEMs, both GAIA and XEIA, are scheduled for repairing/servicing in the middle of August, most likely starting on August 11th. Hopefully both FIB/SEMs will return to normal operation by the end of August.
- JEOL Ac-TEM/STEM NeoARM200: The team of setting up the microscope operation SOP has made good progress and is continuously working on it. Hopefully it will be done in the near future.
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