Shared Facilities Rates Update for 2016 | Facilities

September 18, 2018 UMD Home FabLab AIMLab

NanoCenter Shared Facilities Rates Update for 2016

Rates are determined by the type of organization from which the funds are paid.

Tool	UMD	External Non-Profit / University	Small Commercial / MTECH	Large Commercial
FabLab
Process Tools	71	108	150	200
Raith E-Beam	41	63	93	150
Hitachi SEM	24	37	57	110
Porosimeter	17	26	46.20	61
Backside Tools	25	38	58	124
JEOL E-Beam	33	51	75	120
JEOL SEM Imaging	23	35	57	110
EBL - Ellionix	85	130	250	250
AIM Lab Tools
Hitachi SEM	45	68	120	150
LaB6	41	62	120	150
FEG TEM	58	88	180	225
Tech Time	35	53	60	65
Microprobe	30	46	120	150
AFM	30	46	55	70
Tescan SEM	45	68	120	150
Tescan FIB/SEM	90	137	180	225
Chemistry SAC Lab
AFM	30	46	85	96
Raman^*	32	49	95	106
CS Wang Glove Box	23	35	84	124
ANS Lab
Woollam Spectroscopic Ellipsometer	41	62	120	155