September 18, 2018 UMD Home FabLab AIMLab

Rates are determined by the type of organization from which the funds are paid.

Tool UMD External Non-Profit / University Small Commercial / MTECH Large Commercial
FabLab
Process Tools 71 108 150 200
Raith E-Beam 41 63 93 150
Hitachi SEM 24 37 57 110
Porosimeter 17 26 46.20 61
Backside Tools 25 38 58 124
JEOL E-Beam 33 51 75 120
JEOL SEM Imaging 23 35 57 110
EBL - Ellionix 85 130 250 250
AIM Lab Tools
Hitachi SEM 45 68 120 150
LaB6 41 62 120 150
FEG TEM 58 88 180 225
Tech Time 35 53 60 65
Microprobe 30 46 120 150
AFM 30 46 55 70
Tescan SEM 45 68 120 150
Tescan FIB/SEM 90 137 180 225
Chemistry SAC Lab
AFM 30 46 85 96
Raman* 32 49 95 106
CS Wang Glove Box 23 35 84 124
ANS Lab
Woollam Spectroscopic Ellipsometer 41 62 120 155

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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