Rates are determined by the type of organization from which the funds are paid.
| Tool | UMD | External Non-Profit / University | Small Commercial / MTECH | Large Commercial |
|---|---|---|---|---|
| FabLab | ||||
| Process Tools | 71 | 108 | 150 | 200 |
| Raith E-Beam | 41 | 63 | 93 | 150 |
| Hitachi SEM | 24 | 37 | 57 | 110 |
| Porosimeter | 17 | 26 | 46.20 | 61 |
| Backside Tools | 25 | 38 | 58 | 124 |
| JEOL E-Beam | 33 | 51 | 75 | 120 |
| JEOL SEM Imaging | 23 | 35 | 57 | 110 |
| AIM Lab Tools | ||||
| Hitachi SEM | 45 | 68 | 120 | 150 |
| LaB6 | 41 | 62 | 120 | 150 |
| FEG TEM | 58 | 88 | 180 | 225 |
| Tech Time | 35 | 53 | 60 | 65 |
| Microprobe | 30 | 46 | 120 | 150 |
| AFM | 30 | 46 | 55 | 70 |
| Tescan SEM | 45 | 68 | 120 | 150 |
| Tescan FIB/SEM | 90 | 137 | 180 | 225 |
| Chemistry SAC Lab | ||||
| AFM | 30 | 46 | 85 | 96 |
| Raman* | 32 | 49 | 95 | 106 |
| CS Wang Glove Box | 23 | 35 | 84 | 124 |
| ANS Lab | ||||
| Woollam Spectroscopic Ellipsometer | 41 | 62 | 120 | 155 |
