Rates are determined by the type of organization from which the funds are paid.
Last modified: September 15, 2023 5:43 pm
New rates will be in effect Jan. 1, 2024.
Click here to view the updated rates.
| Tool | UMD | External Non-Profit / University | Small Commercial / MTECH | Large Commercial |
|---|---|---|---|---|
| FabLab | ||||
| Process Tools | 75 | 116 | 158 | 220 |
| Raith E-Beam | 43 | 66 | 98 | 165 |
| Inspection | 40 | 62 | 92 | 160 |
| Hitachi SEM | 25 | 39 | 60 | 121 |
| Porosimeter | 18 | 28 | 49 | 67 |
| Backside Tools | 26 | 40 | 61 | 136 |
| H-J-Y Raman | 34 | 52.50 | 78 | 150 |
| AIM Lab Tools | ||||
| Hitachi SU-70 FEG SEM | 48 | 74 | 126 | 165 |
| JEM 2100 LaB6 TEM | 43 | 66 | 126 | 165 |
| JEM 2100 FEG TEM/STEM | 61 | 94 | 189 | 248 |
| JXA 8900R Microprobe | 32 | 49 | 126 | 165 |
| Tescan GAIA/XEIA FEG SEM | 48 | 74 | 126 | 165 |
| Tescan GAIA/XEIA FIB/SEM | 95 | 147 | 189 | 248 |
| Technical Time | 37 | 57 | 63 | 72 |
| Heating Holder | 32 | 49 | 79 | 110 |
| Cryo Holder/Plunger | 26 | 40 | 52 | 73 |
| Chemistry SAC Lab | ||||
| H-J-Y Raman | 34 | 52.50 | 78 | 150 |
| AFM | 32 | 49 | 90 | 101 |
