August 21, 2017 UMD Home FabLab AIMLab
Annealing
ID Name Location Trainer
CVD-08Annealing Furnace, Multipurpose
FabLabThomas Loughran
Backside
ID Name Location Trainer
BKSIDE-02Dicing Saw A - Microautomation
FabLabJohn Abrahams
BKSIDE-03Dicing Saw B - Microautomation
FabLabJohn Abrahams
BKSIDE-04Glove Box - Exploratory Lab
FabLabMark Lecates
BKSIDE-053-D Printer
Fisher-LabAnthony Melchiorri
CSWANG-01Glove box for Li-ion batteries,Wang lab
CSWangLab
Deposition
ID Name Location Trainer
CVD-02RTA-610
FabLabJohn Abrahams
CVD-03Atomic Layer Deposition System
FabLabJohn Abrahams
CVD-04Nanowire Growth System
FabLabThomas Loughran
CVD-05LP-CVD Furnace
FabLabThomas Loughran
CVD-06Tystar CVD
FabLabThomas Loughran
CVD-07Oxford PECVD
FabLabThomas Loughran
DEP-01AJA Sputtering unit
FabLabJonathan Hummel
DEP-02Metra Thermal Evaporator
FabLabThomas Loughran
DEP-03Denton Ebeam/thermal evaporator
FabLabThomas Loughran
DEP-05Denton DV-502A carbon evaporator
FabLabJonathan Hummel
DEP-06Parylene Coater
FabLabMark Lecates
DEP-07Angstrom NexDep Ebeam evaporator
FabLabMark Lecates
DEP-08Angstrom Ebeam Evaporator PLC Driven -B
FabLabMark Lecates
MOCVD-02III-V MOCVD Material Growth
UMBCFow-Sen Choa
Etching
ID Name Location Trainer
ETCH-01Etch tunnel Acid Bench 1
FabLabFabLab Staff
ETCH-02Etch tunnel Acid Bench 2
FabLabFabLab Staff
ETCH-03Etch tunnel Caustic/Base Bench
FabLabFabLab Staff
ETCH-04Etch tunnel Solvent Bench
FabLabFabLab Staff
ETCH-05Trion RIE
FabLabMark Lecates
ETCH-07Oxford ICP Etcher(Chlorine)
FabLabThomas Loughran
ETCH-08STS Etcher
FabLabJonathan Hummel
ETCH-09Teaching Lab Acid Wet Bench
FabLabFabLab Staff
ETCH-10Teaching Lab Caustic/Solvent Wet Bench
FabLabFabLab Staff
ETCH-11Sample Preb Wet Bench
FabLabMark Lecates
ETCH-12Furnace Preclean Web Bench
FabLabFabLab Staff
ETCH-13Critical Point Dryer
FabLabJonathan Hummel
ETCH-14Oxford Etcher (Fluorine)
FabLabMark Lecates
ETCH-15XactiX Xenon Difluoride Etcher
FabLabJonathan Hummel
ETCH-16Exploratory Lab Wet Bench
FabLabFabLab Staff
Lithography
ID Name Location Trainer
PHOTO-01Raith e_LiNE
FabLabJonathan Hummel
PHOTO-02JEOL 6400/Nabity E-beam
FabLabJonathan Hummel
PHOTO-03MJB-3 Mask aligner- right of spin station
FabLabJohn Abrahams
PHOTO-04MJB-3 Mask dual side aligner Fab Lab
FabLabThomas Loughran
PHOTO-05EVG 620 Mask Aligner
FabLabJohn Abrahams
PHOTO-06EVG 501 Bonder
FabLabJonathan Hummel
PHOTO-07Oriel Mask Aligner
FabLabFabLab Staff
PHOTO-08Photoresist Spin Station- FABLAB-PM-101 manual
FabLabJohn Abrahams
PHOTO-09Photoresist Spin Station- Teaching Lab
FabLabJohn Abrahams
PHOTO-10Developing Bench
FabLabFabLab Staff
PHOTO-11March Jupiter III O2 plasma system
FabLabThomas Loughran
PHOTO-12Polymer Spin Station
FabLabThomas Loughran
PHOTO-13Raith off line computer
FabLabJonathan Hummel
PHOTO-14Branson Barrel Resist Stripper
FabLabMark Lecates
PHOTO-15Photoresist Spin Station- FABLAB-PWM32-Programable
FabLabJohn Abrahams
PHOTO-16Spin Station- Laurell- SU-8 ONLY
FabLabJohn Abrahams
PHOTO-17MA-4 Suss Mask Aligner
FabLabJohn Abrahams
PHOTO-18MJB-3 Mask Aligner- Left of spin station
FabLabFabLab Staff
PHOTO-19Elionix ELS-G100 EBL System
FabLab
Metrology
ID Name Location Trainer
AIM-01JEM 2100 FEG TEM/STEM
AIM LabSz-Chian Liou
AIM-02JXA 8900R Microprobe
AIM LabPhilip Piccoli
AIM-03JEM 2100 LaB6 TEM
AIM LabSz-Chian Liou
AIM-04Hitachi SU-70 FEG SEM
AIM LabSz-Chian Liou
AIM-08Tescan GAIA FEG SEM
AIM LabWen-An Chiou
AIM-08Tescan GAIA FIB/SEM
AIM LabWen-An Chiou
AIM-09Tescan XEIA FEG SEM
AIM LabWen-An Chiou
AIM-09Tescan XEIA Plasma FIB/SEM
AIM LabWen-An Chiou
FML-01TA Instruments DSC Q100
FMLJohn Daristotle
FML-02TA Instruments DMA Q800
FMLJohn Daristotle
FML-03Waters GPC
FMLJohn Daristotle
FML-04Ultramicrotome: Leica EM UC6
FMLJohn Daristotle
FML-05UV/Vis Spectrophotometer
FMLJohn Daristotle
FML-06Microbalance: Sartorius ME-5
FMLJohn Daristotle
MET-01Hitachi S-3400 Variable Pressure SEM
FabLabJonathan Hummel
MET-02Stress Measurement Tool
FabLabThomas Loughran
MET-03N&K Spectrophotometer
FabLabJohn Abrahams
MET-05Profilometer P-20 Long Scan profiler
FabLabMark Lecates
MET-06Optical Microscope
FabLabFabLab Staff
MET-07Profilometer Tencor Alpha Step 200
FabLabMark Lecates
MET-08Optical Microscope
FabLabFabLab Staff
MET-09Optical Microscope
FabLabFabLab Staff
MET-10Optical Microscope
FabLabFabLab Staff
MET-11Probe Station I- with 4155C
FabLabJohn Abrahams
MET-12MicroZoom Probe Station
FabLabFabLab Staff
MET-13Hall Effect Measurement System
FabLabJohn Abrahams
MET-14Solar Cell Simulator
FabLabJohn Abrahams
MET-15Micromeritics ASAP 2020 Porosimeter Test Station
FabLabJohn Abrahams
MET-16Micromeritics ASAP 2020 Porosimeter Degas #1
FabLabJohn Abrahams
MET-17Probe Station II
FabLabJohn Abrahams
MET-18Micromeritics ASAP 2020 Porosimeter Degas #2
FabLabJohn Abrahams
MET-19JEOL 6400 SEM imaging
FabLabJonathan Hummel
MET-20Arbin BT2000 Battery Test Station
FabLab
MET-22Profilometer P-1 Long Scan Profiler
FabLabMark Lecates
MET-24ICPE-9000 ICP Atomic Emission Spectrometer
EnvEngLabMarya Anderson
MET-26Woollam Spectroscopic Ellipsometer
FabLabJohn Abrahams
MET-27H-J-Y Raman Microscope
FabLabFabLab Staff
MET-28NTegra Spectra EC SPM Raman
FabLabGary Rubloff
MET-30SHIMADZU IR Prestige21 FTIR Spectrometer
FabLabJohn Abrahams
SAC-01H-J-Y Raman Microscope (Chemistry)
SACKaren Gaskell
SAC-02AFM -DI Nanoscope III multimode (Chemistry)
SACKaren Gaskell

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