November 7, 2024 UMD Home FabLab AIMLab
Beneq Atomic Layer Deposition System Back to Equipment List
Operational Status ● Online
Description

The Ozone generator for the ALD has been repaired. The TMA and DEZ in the Beneq ALD has been refilled. No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($81/hour for UMD use, $126 Non- profit/University, $166- Small commercial, $242- Large commercial) followed by $36/hour after that.

Vanadium Oxides at standard rates ($81/hour for UMD- see above for other organizations) for TWO hours then $11/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.


TMA is out and need to be refilled. Check announcements for details

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-5018
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Oct 31, 2024
3:00 pm - 4:30 pm
Gillian Boyce
View Reservation

Deleted by: Gillian Boyce

Al2O3 at 150C
Fri, Oct 25, 2024
12:15 pm - 1:45 pm
George Alexander
View Reservation
ZnO
Wed, Oct 23, 2024
11:00 am - 12:30 pm
Gillian Boyce
View Reservation
Al2O3 at 150C
Mon, Oct 21, 2024
11:00 am - 12:00 pm
Prem Jaschin
View Reservation

Deleted by: Prem Jaschin

Wed, Oct 16, 2024
10:00 am - 3:00 pm
Zihan Sun
View Reservation
V2O5
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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