December 1, 2021 UMD Home FabLab AIMLab
Atomic Layer Deposition System Back to Equipment List
Operational Status ‚óŹ Online

Do NOT SAVE RECIPES- there is a software glitch that removes all recipes if you save- No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($75/hour for UMD use, $116 Non- profit/University, $158- Small commercial, $220- Large commercial) followed by $35/hour after that.

Vanadium Oxides at standard rates ($75/hour for UMD- see above for other organizations) for TWO hours then $10/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.

Operation is limited to users approved and trained by FabLab staff.

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Staff Contact JohnJohn Abrahams
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Wed, Dec 01, 2021
9:00 am - 4:00 pm
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder (total 31 hours, this is a continuation of reservation sc1619eb04d46165)
Tue, Nov 30, 2021
9:00 am - 9:00 am
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder. This is part 1, continued with reservation sc1619eb17beb0af
Tue, Nov 23, 2021
4:00 pm - 5:00 pm
Xizheng Wang
View Reservation
Tue, Nov 23, 2021
11:00 am - 4:00 pm
Shoukang Hong
View Reservation

Deleted by: Shoukang Hong

Mon, Nov 22, 2021
11:00 am - 11:00 am
Steve LeKarz
View Reservation
Multi-layer deposit of Al2O3 + TiO2. $158/hr 1st 4 hours, $35/hr remainder
Records to show:
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland