September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List XactiX Xenon Difluoride Etcher

XeF2 (xenon difluoride) isotropic silicon etching is particularly well suited to MEMS applications. XeF2 vapor phase etching exhibits nearly infinite selectivity of silicon to photo-resist, silicon dioxide, silicon nitride and aluminum. Being a vapor phase etchant, XeF2 avoids many of the problems typically associated with wet processes.

To use the etcher, simply place your wafer, die, or other structure into the etch chamber, close the lid, set the etching conditions, and press start on the software. The details of the process sequence are captured in the control software, and the user just has to set target etch conditions.

The XactiX xenonn difluoride etcher is used to release MEMs structures. XeF2 shows nearly infinite selectivity to silicon over almost all standard semiconductor materials including photoresist, silicon dioxide, silicon nitride and aluminum.

Location FabLab | ETCH Tunnel
Manufacturer Xactix
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Fri, Sep 25, 2020
9:45 am - 10:45 am
Sean O'Leary
View Reservation

Deleted by: Jonathan Hummel

Fri, Jul 17, 2020
9:00 am - 10:15 am
Raymond Mencia
View Reservation

Deleted by: Jonathan Hummel

Tue, Feb 04, 2020
2:00 pm -
Tilak Hewagama
View Reservation
Mon, Jan 27, 2020
2:30 pm - 2:45 pm
Raymond Mencia
View Reservation
Fri, Jan 17, 2020
3:00 pm - 3:15 pm
Raymond Mencia
View Reservation
Records to show:
Etch - 15 Xactix Xenon Difluoride Etcher SOP.pdf (866.97 KB)
index.php (38 B)

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