December 1, 2021 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact Wen-AnWen-An Chiou
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
12/02/2021 11:00 AM 11:30 AM Kyle Webb
12/02/2021 01:00 PM 04:00 PM Shuangshuang Jing
12/03/2021 11:00 AM 12:00 PM Md Anisur Rahman
12/03/2021 05:00 PM 12:00 AM Jiancun Rao
12/04/2021 12:00 AM 12:00 AM Jiancun Rao
Mon, Dec 13, 2021
- 3:30 pm
Jiancun Rao
View Reservation
System cold start
Sun, Dec 12, 2021
Jiancun Rao
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KEB all power outage
Sat, Dec 11, 2021
Jiancun Rao
View Reservation
KEB all power outage
Fri, Dec 10, 2021
5:00 pm -
Jiancun Rao
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KEB all power outage
Tue, Dec 07, 2021
8:30 am - 10:00 am
View Reservation
SEM, Assisted by SCL
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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