September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA FEG SEM

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact Wen-AnWen-An Chiou
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Date Start End User
09/30/2020 09:00 AM 12:00 PM Robert Ugalino
09/30/2020 12:00 PM 01:00 PM Tanner Hamann
09/30/2020 01:00 PM 03:00 PM Gang Chen
09/30/2020 03:00 PM 05:00 PM Joseph Brock
10/01/2020 10:30 AM 12:00 PM Jianguo Li
Thu, Oct 01, 2020
1:00 pm - 3:00 pm
Carl Brando
View Reservation
SEM training by JCRao
Thu, Oct 01, 2020
12:00 pm - 1:00 pm
Jianguo Li
View Reservation
Thu, Oct 01, 2020
10:30 am - 12:00 pm
Jianguo Li
View Reservation
2 persons
Wed, Sep 30, 2020
3:00 pm - 5:00 pm
Joseph Brock
View Reservation
Wed, Sep 30, 2020
1:00 pm - 3:00 pm
Gang Chen
View Reservation
SEM training by JCRao
Records to show:

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland