March 28, 2024 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Rates
UMD
$52/hr
External Non-profit / University
$81/hr
Small Commercial / MTECH
$132/hr
Large Commercial
$182/hr
No Charge
$0/hr
Reservations
Date Start End User
03/28/2024 03:00 PM 05:00 PM Aiden Reilly
03/29/2024 09:00 AM 10:00 AM mona abostate
03/29/2024 10:00 AM 12:00 PM Shadin Doski
03/29/2024 03:00 PM 05:00 PM Aiden Reilly
03/29/2024 05:00 PM 05:30 PM Hanyu Liu
Logs
Fri, Apr 05, 2024
3:00 pm - 5:00 pm
Aiden Reilly
View Reservation
Wed, Apr 03, 2024
3:00 pm - 6:00 pm
Ji Yang
View Reservation
Wed, Apr 03, 2024
1:00 pm - 3:00 pm
Aiden Reilly
View Reservation
Mon, Apr 01, 2024
1:30 pm - 3:00 pm
Aiden Reilly
View Reservation
Mon, Apr 01, 2024
9:00 am - 12:00 pm
Amirehsan Alizadehherfati
View Reservation
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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