July 6, 2025 UMD Home FabLab AIM Lab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Rates
Large Commercial
$182/hr
Small Commercial / MTECH
$132/hr
External Non-profit / University
$81/hr
UMD
$52/hr
No Charge
$0/hr
Reservations
Date Start End User
07/07/2025 01:00 PM 03:00 PM Danila Sokratov
07/09/2025 09:30 AM 01:30 PM Jess Garnett
Logs
Wed, Jul 09, 2025
9:30 am - 1:30 pm
Jess Garnett
View Reservation
Mon, Jul 07, 2025
1:00 pm - 3:00 pm
Danila Sokratov
View Reservation
Sat, Jul 05, 2025
- 8:00 am
Wen-An Chiou
View Reservation
Fri, Jul 04, 2025
- 8:00 am
Wen-An Chiou
View Reservation
National Holiday, AIM Lab closed.
Thu, Jul 03, 2025
2:00 pm - 5:00 pm
Veera Chaitanya Rutvik Davuluri
View Reservation
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SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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