January 16, 2018 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$45/hr
External Non-profit / University
$68/hr
Small Commercial / MTECH
$120/hr
Large Commercial
$155/hr
Reservations No upcoming reservations at this time.
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Logs
Fri, Jan 12, 2018
1:00 pm - 3:00 pm
Changmin Lee
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Fri, Jan 12, 2018
9:00 am - 12:00 pm
Changmin Lee
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Thu, Jan 11, 2018
2:00 pm - 3:00 pm
Hua Xie
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Thu, Jan 11, 2018
1:00 pm - 2:00 pm
Yonggang Yao
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Thu, Jan 11, 2018
10:00 am - 12:00 pm
Young Min Kim
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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