September 28, 2020 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$45/hr
External Non-profit / University
$68/hr
Small Commercial / MTECH
$120/hr
Large Commercial
$155/hr
Reservations
Date Start End User
09/30/2020 09:00 AM 12:00 PM Robert Ugalino
09/30/2020 12:00 PM 01:00 PM Tanner Hamann
09/30/2020 01:00 PM 03:00 PM Gang Chen
09/30/2020 03:00 PM 05:00 PM Joseph Brock
10/01/2020 10:30 AM 12:00 PM Jianguo Li
Logs
Thu, Oct 01, 2020
1:00 pm - 3:00 pm
Carl Brando
View Reservation
SEM training by JCRao
Thu, Oct 01, 2020
12:00 pm - 1:00 pm
Jianguo Li
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Thu, Oct 01, 2020
10:30 am - 12:00 pm
Jianguo Li
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2 persons
Wed, Sep 30, 2020
3:00 pm - 5:00 pm
Joseph Brock
View Reservation
Wed, Sep 30, 2020
1:00 pm - 3:00 pm
Gang Chen
View Reservation
SEM training by JCRao
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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