August 19, 2022 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact Wen-AnWen-An Chiou
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
08/19/2022 08:00 AM 11:00 AM Jarryd Horn
08/19/2022 11:00 AM 01:00 PM Fariba Islam
08/19/2022 01:00 PM 02:00 PM Hanyu Liu
08/19/2022 02:00 PM 04:00 PM Fariba Islam
08/19/2022 04:00 PM 05:30 PM Michael Danner
Wed, Aug 24, 2022
1:00 pm - 3:00 pm
Abhijit Biswas
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Wed, Aug 24, 2022
11:00 am - 1:00 pm
Fariba Islam
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Wed, Aug 24, 2022
10:00 am - 11:00 am
Changmin Lee
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SEM exam by JCRao
Tue, Aug 23, 2022
3:00 pm - 5:00 pm
Abhijit Biswas
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Mon, Aug 22, 2022
2:00 pm - 5:00 pm
Bo Chen
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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